Field-emission durability employing highly crystalline single-walled carbon nanotubes in a low vacuum with activated gas

Norihiro Shimoi, Kazuyuki Tohji

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

A new approach to improving power consumption and energy efficiency is to use a simple structure with highly crystalline single-walled carbon nanotubes (hc-SWCNTs) in the cathode. We succeeded in determining the efficacy and applicability of the field emission (FE) properties of hc-SWCNTs in a low vacuum below 0.1 Pa with activated gas. In particular, the FE of 1.0 mA cm-2 of hc-SWCNTs heated at 50 C exhibits good stability for over 600 s in a low-vacuum atmosphere with oxygen added in a cathodic planar field emitter. The improved FE electrical properties of the hc-SWCNTs can likely be attributed to the increase in the crystallinity of the SWCNTs despite the low-vacuum atmosphere. It is further expected that the hc-SWCNT field emitters will be applicable to dry etching processes because single ionized molecules or radicals can be selectively synthesized with almost no energy loss and without requiring a cooling system. Our novel SWCNTs, as a component of a flat plane-emission device, may provide a technological breakthrough for realizing both energy saving and a low carbon environment in dry etching processes as well as in semiconductor industrial development.

Original languageEnglish
Article number505303
JournalJournal of Physics D: Applied Physics
Volume52
Issue number50
DOIs
Publication statusPublished - 2019 Oct 3

Keywords

  • activated gas
  • field emission
  • low energy electron beam
  • low vacuum
  • single-walled carbon nanotube

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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