Abstract
A new approach to improving power consumption and energy efficiency is to use a simple structure with highly crystalline single-walled carbon nanotubes (hc-SWCNTs) in the cathode. We succeeded in determining the efficacy and applicability of the field emission (FE) properties of hc-SWCNTs in a low vacuum below 0.1 Pa with activated gas. In particular, the FE of 1.0 mA cm-2 of hc-SWCNTs heated at 50 C exhibits good stability for over 600 s in a low-vacuum atmosphere with oxygen added in a cathodic planar field emitter. The improved FE electrical properties of the hc-SWCNTs can likely be attributed to the increase in the crystallinity of the SWCNTs despite the low-vacuum atmosphere. It is further expected that the hc-SWCNT field emitters will be applicable to dry etching processes because single ionized molecules or radicals can be selectively synthesized with almost no energy loss and without requiring a cooling system. Our novel SWCNTs, as a component of a flat plane-emission device, may provide a technological breakthrough for realizing both energy saving and a low carbon environment in dry etching processes as well as in semiconductor industrial development.
| Original language | English |
|---|---|
| Article number | 505303 |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 52 |
| Issue number | 50 |
| DOIs | |
| Publication status | Published - 2019 Oct 3 |
Keywords
- activated gas
- field emission
- low energy electron beam
- low vacuum
- single-walled carbon nanotube
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Acoustics and Ultrasonics
- Surfaces, Coatings and Films