Abstract
Closed magnetic circuit type ferromagnetic RF integrated inductors have been fabricated based on MEMS-like micro fabrication techniques. The taper etching process greatly helped to endure sufficient magnetic flux flow at the edge of the top and bottom magnetic layers. Air cores and three different sandwich type ferromagnetic inductos are also microfabricated. Measured results exhibited the quality factor Q=12, being highest among the published data of ferromagnetic RF integrated Inductor at 1 GHz.
Original language | English |
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Title of host publication | 2005 IEEE MTT-S International Microwave Symposium Digest |
Pages | 351-354 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 2005 Dec 1 |
Event | 2005 IEEE MTT-S International Microwave Symposium - Long Beach, CA, United States Duration: 2005 Jun 12 → 2005 Jun 17 |
Publication series
Name | IEEE MTT-S International Microwave Symposium Digest |
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Volume | 2005 |
ISSN (Print) | 0149-645X |
Other
Other | 2005 IEEE MTT-S International Microwave Symposium |
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Country | United States |
City | Long Beach, CA |
Period | 05/6/12 → 05/6/17 |
Keywords
- Electromagnetic field simulation
- Integrated inductor
- Magnetic film
- Quality factor
ASJC Scopus subject areas
- Radiation
- Condensed Matter Physics
- Electrical and Electronic Engineering