Ferromagnetic RF integrated inductor with closed magnetic circuit structure

Masahiro Yamaguchi; Seok Bae; Ki Hyeon Kim; Kenji Tan; Takayuki Kusumi; Kiyoshi Yamakawa

doi:10.1109/MWSYM.2005.1516599

Ferromagnetic RF integrated inductor with closed magnetic circuit structure

Masahiro Yamaguchi, Seok Bae, Ki Hyeon Kim, Kenji Tan, Takayuki Kusumi, Kiyoshi Yamakawa

ENG - Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

26 Citations (Scopus)

Abstract

Closed magnetic circuit type ferromagnetic RF integrated inductors have been fabricated based on MEMS-like micro fabrication techniques. The taper etching process greatly helped to endure sufficient magnetic flux flow at the edge of the top and bottom magnetic layers. Air cores and three different sandwich type ferromagnetic inductos are also microfabricated. Measured results exhibited the quality factor Q=12, being highest among the published data of ferromagnetic RF integrated Inductor at 1 GHz.

Original language	English
Title of host publication	2005 IEEE MTT-S International Microwave Symposium Digest
Pages	351-354
Number of pages	4
DOIs	https://doi.org/10.1109/MWSYM.2005.1516599
Publication status	Published - 2005 Dec 1
Event	2005 IEEE MTT-S International Microwave Symposium - Long Beach, CA, United States Duration: 2005 Jun 12 → 2005 Jun 17

Publication series

Name	IEEE MTT-S International Microwave Symposium Digest
Volume	2005
ISSN (Print)	0149-645X

Other

Other	2005 IEEE MTT-S International Microwave Symposium
Country	United States
City	Long Beach, CA
Period	05/6/12 → 05/6/17

Keywords

Electromagnetic field simulation
Integrated inductor
Magnetic film
Quality factor

ASJC Scopus subject areas

Radiation
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/MWSYM.2005.1516599

Fingerprint Dive into the research topics of 'Ferromagnetic RF integrated inductor with closed magnetic circuit structure'. Together they form a unique fingerprint.

Cite this

Ferromagnetic RF integrated inductor with closed magnetic circuit structure. / Yamaguchi, Masahiro; Bae, Seok; Kim, Ki Hyeon; Tan, Kenji; Kusumi, Takayuki; Yamakawa, Kiyoshi.

2005 IEEE MTT-S International Microwave Symposium Digest. 2005. p. 351-354 1516599 (IEEE MTT-S International Microwave Symposium Digest; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yamaguchi, M, Bae, S, Kim, KH, Tan, K, Kusumi, T & Yamakawa, K 2005, Ferromagnetic RF integrated inductor with closed magnetic circuit structure. in 2005 IEEE MTT-S International Microwave Symposium Digest., 1516599, IEEE MTT-S International Microwave Symposium Digest, vol. 2005, pp. 351-354, 2005 IEEE MTT-S International Microwave Symposium, Long Beach, CA, United States, 05/6/12. https://doi.org/10.1109/MWSYM.2005.1516599

@inproceedings{0c5dea7128fe4aa5bdc3b6d77705c126,

title = "Ferromagnetic RF integrated inductor with closed magnetic circuit structure",

abstract = "Closed magnetic circuit type ferromagnetic RF integrated inductors have been fabricated based on MEMS-like micro fabrication techniques. The taper etching process greatly helped to endure sufficient magnetic flux flow at the edge of the top and bottom magnetic layers. Air cores and three different sandwich type ferromagnetic inductos are also microfabricated. Measured results exhibited the quality factor Q=12, being highest among the published data of ferromagnetic RF integrated Inductor at 1 GHz.",

keywords = "Electromagnetic field simulation, Integrated inductor, Magnetic film, Quality factor",

author = "Masahiro Yamaguchi and Seok Bae and Kim, {Ki Hyeon} and Kenji Tan and Takayuki Kusumi and Kiyoshi Yamakawa",

year = "2005",

month = dec,

day = "1",

doi = "10.1109/MWSYM.2005.1516599",

language = "English",

isbn = "0780388461",

series = "IEEE MTT-S International Microwave Symposium Digest",

pages = "351--354",

booktitle = "2005 IEEE MTT-S International Microwave Symposium Digest",

note = "2005 IEEE MTT-S International Microwave Symposium ; Conference date: 12-06-2005 Through 17-06-2005",

}

TY - GEN

T1 - Ferromagnetic RF integrated inductor with closed magnetic circuit structure

AU - Yamaguchi, Masahiro

AU - Bae, Seok

AU - Kim, Ki Hyeon

AU - Tan, Kenji

AU - Kusumi, Takayuki

AU - Yamakawa, Kiyoshi

PY - 2005/12/1

Y1 - 2005/12/1

N2 - Closed magnetic circuit type ferromagnetic RF integrated inductors have been fabricated based on MEMS-like micro fabrication techniques. The taper etching process greatly helped to endure sufficient magnetic flux flow at the edge of the top and bottom magnetic layers. Air cores and three different sandwich type ferromagnetic inductos are also microfabricated. Measured results exhibited the quality factor Q=12, being highest among the published data of ferromagnetic RF integrated Inductor at 1 GHz.

AB - Closed magnetic circuit type ferromagnetic RF integrated inductors have been fabricated based on MEMS-like micro fabrication techniques. The taper etching process greatly helped to endure sufficient magnetic flux flow at the edge of the top and bottom magnetic layers. Air cores and three different sandwich type ferromagnetic inductos are also microfabricated. Measured results exhibited the quality factor Q=12, being highest among the published data of ferromagnetic RF integrated Inductor at 1 GHz.

KW - Electromagnetic field simulation

KW - Integrated inductor

KW - Magnetic film

KW - Quality factor

UR - http://www.scopus.com/inward/record.url?scp=33749258234&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33749258234&partnerID=8YFLogxK

U2 - 10.1109/MWSYM.2005.1516599

DO - 10.1109/MWSYM.2005.1516599

M3 - Conference contribution

AN - SCOPUS:33749258234

SN - 0780388461

SN - 9780780388468

T3 - IEEE MTT-S International Microwave Symposium Digest

SP - 351

EP - 354

BT - 2005 IEEE MTT-S International Microwave Symposium Digest

T2 - 2005 IEEE MTT-S International Microwave Symposium

Y2 - 12 June 2005 through 17 June 2005

ER -