Ferromagnetic RF integrated inductor with closed magnetic circuit structure

Masahiro Yamaguchi; Seok Bae; Ki Hyeon Kim; Kenji Tan; Takayuki Kusumi; Kiyoshi Yamakawa

doi:10.1109/MWSYM.2005.1516599

Ferromagnetic RF integrated inductor with closed magnetic circuit structure

Masahiro Yamaguchi, Seok Bae, Ki Hyeon Kim, Kenji Tan, Takayuki Kusumi, Kiyoshi Yamakawa

ENG - Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

27 Citations (Scopus)

Abstract

Closed magnetic circuit type ferromagnetic RF integrated inductors have been fabricated based on MEMS-like micro fabrication techniques. The taper etching process greatly helped to endure sufficient magnetic flux flow at the edge of the top and bottom magnetic layers. Air cores and three different sandwich type ferromagnetic inductos are also microfabricated. Measured results exhibited the quality factor Q=12, being highest among the published data of ferromagnetic RF integrated Inductor at 1 GHz.

Original language	English
Title of host publication	2005 IEEE MTT-S International Microwave Symposium Digest
Pages	351-354
Number of pages	4
DOIs	https://doi.org/10.1109/MWSYM.2005.1516599
Publication status	Published - 2005 Dec 1
Event	2005 IEEE MTT-S International Microwave Symposium - Long Beach, CA, United States Duration: 2005 Jun 12 → 2005 Jun 17

Publication series

Name	IEEE MTT-S International Microwave Symposium Digest
Volume	2005
ISSN (Print)	0149-645X

Other

Other	2005 IEEE MTT-S International Microwave Symposium
Country/Territory	United States
City	Long Beach, CA
Period	05/6/12 → 05/6/17

Keywords

Electromagnetic field simulation
Integrated inductor
Magnetic film
Quality factor

ASJC Scopus subject areas

Radiation
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/MWSYM.2005.1516599

Cite this

Yamaguchi, M, Bae, S, Kim, KH, Tan, K, Kusumi, T & Yamakawa, K 2005, Ferromagnetic RF integrated inductor with closed magnetic circuit structure. in 2005 IEEE MTT-S International Microwave Symposium Digest., 1516599, IEEE MTT-S International Microwave Symposium Digest, vol. 2005, pp. 351-354, 2005 IEEE MTT-S International Microwave Symposium, Long Beach, CA, United States, 05/6/12. https://doi.org/10.1109/MWSYM.2005.1516599

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title = "Ferromagnetic RF integrated inductor with closed magnetic circuit structure",

abstract = "Closed magnetic circuit type ferromagnetic RF integrated inductors have been fabricated based on MEMS-like micro fabrication techniques. The taper etching process greatly helped to endure sufficient magnetic flux flow at the edge of the top and bottom magnetic layers. Air cores and three different sandwich type ferromagnetic inductos are also microfabricated. Measured results exhibited the quality factor Q=12, being highest among the published data of ferromagnetic RF integrated Inductor at 1 GHz.",

keywords = "Electromagnetic field simulation, Integrated inductor, Magnetic film, Quality factor",

author = "Masahiro Yamaguchi and Seok Bae and Kim, {Ki Hyeon} and Kenji Tan and Takayuki Kusumi and Kiyoshi Yamakawa",

year = "2005",

month = dec,

day = "1",

doi = "10.1109/MWSYM.2005.1516599",

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series = "IEEE MTT-S International Microwave Symposium Digest",

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booktitle = "2005 IEEE MTT-S International Microwave Symposium Digest",

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AU - Yamaguchi, Masahiro

AU - Bae, Seok

AU - Kim, Ki Hyeon

AU - Tan, Kenji

AU - Kusumi, Takayuki

AU - Yamakawa, Kiyoshi

PY - 2005/12/1

Y1 - 2005/12/1

N2 - Closed magnetic circuit type ferromagnetic RF integrated inductors have been fabricated based on MEMS-like micro fabrication techniques. The taper etching process greatly helped to endure sufficient magnetic flux flow at the edge of the top and bottom magnetic layers. Air cores and three different sandwich type ferromagnetic inductos are also microfabricated. Measured results exhibited the quality factor Q=12, being highest among the published data of ferromagnetic RF integrated Inductor at 1 GHz.

AB - Closed magnetic circuit type ferromagnetic RF integrated inductors have been fabricated based on MEMS-like micro fabrication techniques. The taper etching process greatly helped to endure sufficient magnetic flux flow at the edge of the top and bottom magnetic layers. Air cores and three different sandwich type ferromagnetic inductos are also microfabricated. Measured results exhibited the quality factor Q=12, being highest among the published data of ferromagnetic RF integrated Inductor at 1 GHz.

KW - Electromagnetic field simulation

KW - Integrated inductor

KW - Magnetic film

KW - Quality factor

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U2 - 10.1109/MWSYM.2005.1516599

DO - 10.1109/MWSYM.2005.1516599

M3 - Conference contribution

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SN - 0780388461

SN - 9780780388468

T3 - IEEE MTT-S International Microwave Symposium Digest

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BT - 2005 IEEE MTT-S International Microwave Symposium Digest

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ER -

Ferromagnetic RF integrated inductor with closed magnetic circuit structure

Abstract

Publication series

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Keywords

ASJC Scopus subject areas

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