We succeeded in observing the ferroelectric polarization reversal of VDF/TrFE thin films down to 9.7 nm in thickness. Reduced thickness below 56 nm induced marked reduction in P r and ε r/ε 0. These results indicate the existence of the surface dead layer in VDF/TrFE which induces the polarization switch back due to the generated depolarization field. To fabricate a thin PVDF film with smooth surface is more difficult owing to the coexistence of the different polymorphs. We obtained uniform PVDF film consisting of the spherical grains by spin-coating with solution temperature of 120 °C. After the application of electric pulses to enhance the polarization, clear polarization reversal with P r of 0.06 C/m 2 was observed for 60-nm-thick PVDF film.