Ferroelectric single crystal recording media fabricated by polarization controlled wet etching process

Yoshiomi Hiranaga, Yasuo Wagatsuma, Yasuo Cho

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

Ferroelectric single crystal thin plates are promising materials for ultrahigh-density storage devices. In order to fabricate recording media with large area and high homogeneity, a polarization controlled wet etching process was developed in this paper. Differential etch rates of ferroelectrics are useful in controlling the thickness during the wet etching process. By applying DC voltage to a substrate, the etching process can be stopped when the thickness reaches the desired value. A 455-nm-thick LiTaO3 thin plate with a diameter of 3 mm was prepared using this method. Nanodomains were artificially formed by applying voltage pulses to the substrate using a metal-coated cantilever top electrode.

Original languageEnglish
Pages (from-to)L569-L571
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume43
Issue number4 B
DOIs
Publication statusPublished - 2004 Apr 15

Keywords

  • Differential etch rate
  • Ferroelectric data storage
  • Lithium tantalite
  • Nanodomain
  • Scanning nonlinear dielectric microscopy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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