Ferroelectric property of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method

Takeshi Morita, Yasuo Wagatsuma, Yasuo Cho, Hitoshi Morioka, Hiroshi Funakubo, Setter Nava

Research output: Contribution to journalConference article

Abstract

Hydrothermal method has various advantages; low deposition temperature, high-purity, deposition on a three-dimensional structure and a large thickness. Although epitaxial PZT thin film deposition has reported, ferroelectric measurement has not been conducted due to the peel-off morphology of the film. The present paper investigates the improvement of an epitaxial PZT thin film deposited via a hydrothermal method. By adjusting the position at which the substrate was suspended in the solution, smooth morphology surface was successfully obtained. As a bottom electrode, 200 nm SrRuO3 thin film was deposited on SrTiO3 single crystals, and the PZT thin was deposited on SrRuO3. The remanent polarization 2Pr for PZT on SrRuO3/SrTiO3 (001) was 19.5 μC/cm2 and that of PZT on SrRuO3/SrTiO3 (111) was 37.2 μC/cm 2, respectively. The self alignment poling direction was confirmed via scanning nonlinear dielectric microscopy and is thought to have been related to the deposition mechanisms.

Original languageEnglish
Pages (from-to)231-236
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume784
DOIs
Publication statusPublished - 2003
EventFerroelectric Thin Films XII - Boston, MA, United States
Duration: 2003 Dec 12003 Dec 4

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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