Abstract
Nanostructure processing method with high productivity is desired for many practical uses. Recent studies report that femtosecond laser process is expected as one of high productive process. By irradiating femtosecond laser to the polished target surface, it is possible to form a nanostructure on laser irradiation entire area. But this method cannot be easily applied to glass substrate because this method needs to generate surface plasmon polariton by laser irradiation. Our research group invented a new method for forming a nano-sizcd texturing on a glass by using light absorbable metal nanoparticles and glass precursor. We made nano-sizcd surface structure on the glass sample, and showed the anti-reflection effect.
| Original language | English |
|---|---|
| Pages (from-to) | 862-866 |
| Number of pages | 5 |
| Journal | Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering |
| Volume | 81 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 2015 Sep 1 |
Keywords
- Femtosecond-laser
- Functional interface
- Glass
- Nano-sizcd texturing
- Poly-silazane
- Surface plasmon
ASJC Scopus subject areas
- Mechanical Engineering
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Cite this
Shibata, A., Kaneko, N., Suzuki, S., Kodama, S., Shimizu, J., Shimada, K., Mizutani, M., & Kuriyagawa, T. (2015). Femtosecond-laser-induced nanofabrication on glass. Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 81(9), 862-866. https://doi.org/10.2493/jjspe.81.862