Femtosecond-laser-assisted chemical vapor deposition of Cr Metal

Tare Hitosugi, Takeshi Mizuno

    Research output: Contribution to journalArticlepeer-review

    3 Citations (Scopus)

    Abstract

    Focused femtosecond lasers have been used to deposit Cr lines by the nonlinear excitation of Cr(CO)6 on the surfaces of BK7 glass, soda glass and Cr thin films. Cr lines with a linewidth of 570 nm, which is beyond the diffraction limit, were deposited on BK7 glass. The surface morphology of the deposits were found to be sensitive not only to a fluence of laser pulses but also to the numerical apertures of various objective lenses.

    Original languageEnglish
    Pages (from-to)L596-L598
    JournalJapanese Journal of Applied Physics, Part 2: Letters
    Volume44
    Issue number16-19
    DOIs
    Publication statusPublished - 2005 Dec 1

    Keywords

    • CVD
    • Chemical vapor deposition
    • Deposition
    • Femtosecond laser
    • Numerical aperture
    • Thin film

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy (miscellaneous)
    • Physics and Astronomy(all)

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