Femtosecond-laser-assisted chemical vapor deposition of Cr Metal

Tare Hitosugi; Takeshi Mizuno

doi:10.1143/JJAP.44.L596

Femtosecond-laser-assisted chemical vapor deposition of Cr Metal

Tare Hitosugi, Takeshi Mizuno

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Focused femtosecond lasers have been used to deposit Cr lines by the nonlinear excitation of Cr(CO)₆ on the surfaces of BK7 glass, soda glass and Cr thin films. Cr lines with a linewidth of 570 nm, which is beyond the diffraction limit, were deposited on BK7 glass. The surface morphology of the deposits were found to be sensitive not only to a fluence of laser pulses but also to the numerical apertures of various objective lenses.

Original language	English
Pages (from-to)	L596-L598
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	44
Issue number	16-19
DOIs	https://doi.org/10.1143/JJAP.44.L596
Publication status	Published - 2005
Externally published	Yes

Keywords

CVD
Chemical vapor deposition
Deposition
Femtosecond laser
Numerical aperture
Thin film

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.44.L596

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title = "Femtosecond-laser-assisted chemical vapor deposition of Cr Metal",

abstract = "Focused femtosecond lasers have been used to deposit Cr lines by the nonlinear excitation of Cr(CO)6 on the surfaces of BK7 glass, soda glass and Cr thin films. Cr lines with a linewidth of 570 nm, which is beyond the diffraction limit, were deposited on BK7 glass. The surface morphology of the deposits were found to be sensitive not only to a fluence of laser pulses but also to the numerical apertures of various objective lenses.",

keywords = "CVD, Chemical vapor deposition, Deposition, Femtosecond laser, Numerical aperture, Thin film",

author = "Tare Hitosugi and Takeshi Mizuno",

year = "2005",

doi = "10.1143/JJAP.44.L596",

language = "English",

volume = "44",

pages = "L596--L598",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

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T1 - Femtosecond-laser-assisted chemical vapor deposition of Cr Metal

AU - Hitosugi, Tare

AU - Mizuno, Takeshi

PY - 2005

Y1 - 2005

N2 - Focused femtosecond lasers have been used to deposit Cr lines by the nonlinear excitation of Cr(CO)6 on the surfaces of BK7 glass, soda glass and Cr thin films. Cr lines with a linewidth of 570 nm, which is beyond the diffraction limit, were deposited on BK7 glass. The surface morphology of the deposits were found to be sensitive not only to a fluence of laser pulses but also to the numerical apertures of various objective lenses.

AB - Focused femtosecond lasers have been used to deposit Cr lines by the nonlinear excitation of Cr(CO)6 on the surfaces of BK7 glass, soda glass and Cr thin films. Cr lines with a linewidth of 570 nm, which is beyond the diffraction limit, were deposited on BK7 glass. The surface morphology of the deposits were found to be sensitive not only to a fluence of laser pulses but also to the numerical apertures of various objective lenses.

KW - CVD

KW - Chemical vapor deposition

KW - Deposition

KW - Femtosecond laser

KW - Numerical aperture

KW - Thin film

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

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ER -

Femtosecond-laser-assisted chemical vapor deposition of Cr Metal

Abstract

Keywords

ASJC Scopus subject areas

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