Fe/MgO/FeCo(100) epitaxial magnetic tunnel junctions prepared by using in situ plasma oxidation

S. Mitani, T. Moriyama, Koki Takanashi

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)

Abstract

The preparation of epitaxial magnetic tunnel junctions (MTJ) on MgO(100) single crystal substrates with the help of plasma oxidation was discussed. Reflection high-energy electron diffraction (RHEED) was used to study the epitaxial relationship in the junctions. The significance of plasma oxidation in fabricating epitaxial magnetic tunnel junctions was also discussed.

Original languageEnglish
Pages (from-to)8041-8043
Number of pages3
JournalJournal of Applied Physics
Volume93
Issue number10
DOIs
Publication statusPublished - 2003 May 15

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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