Abstract
Three dimensional unite clement method (3D-FEM) simulations have been used to study the possibility of magnetic film utilization to make GHz frequency band inductors, A simple structure of a flat magnetic film above a spiral coil gained about 65% inductance increase. Granular type soft magnetic films showed the best results.
Original language | English |
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Pages (from-to) | 3580-3582 |
Number of pages | 3 |
Journal | IEEE Transactions on Magnetics |
Volume | 35 |
Issue number | 5 PART 2 |
DOIs | |
Publication status | Published - 1999 |
Keywords
- Finite clement method
- MMIC
- Soft magnetic films
- Thin film inductor
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering