FEM analysis of thin-film inductors used in ghz frequency bands

Shiuji Tauabe, Yasuhiro Shiraki, Keuji Itoh, Masabiro Yamagiichi, Keu Ichi Arai

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

Abstract

Three dimensional unite clement method (3D-FEM) simulations have been used to study the possibility of magnetic film utilization to make GHz frequency band inductors, A simple structure of a flat magnetic film above a spiral coil gained about 65% inductance increase. Granular type soft magnetic films showed the best results.

Original languageEnglish
Pages (from-to)3580-3582
Number of pages3
JournalIEEE Transactions on Magnetics
Volume35
Issue number5 PART 2
DOIs
Publication statusPublished - 1999

Keywords

  • Finite clement method
  • MMIC
  • Soft magnetic films
  • Thin film inductor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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