FEM analysis of thin-film inductors used in ghz frequency bands

Shiuji Tauabe; Yasuhiro Shiraki; Keuji Itoh; Masabiro Yamagiichi; Keu Ichi Arai

doi:10.1109/20.800596

FEM analysis of thin-film inductors used in ghz frequency bands

Shiuji Tauabe, Yasuhiro Shiraki, Keuji Itoh, Masabiro Yamagiichi, Keu Ichi Arai

ENG - Electrical Engineering

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

Three dimensional unite clement method (3D-FEM) simulations have been used to study the possibility of magnetic film utilization to make GHz frequency band inductors, A simple structure of a flat magnetic film above a spiral coil gained about 65% inductance increase. Granular type soft magnetic films showed the best results.

Original language	English
Pages (from-to)	3580-3582
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	35
Issue number	5 PART 2
DOIs	https://doi.org/10.1109/20.800596
Publication status	Published - 1999

Keywords

Finite clement method
MMIC
Soft magnetic films
Thin film inductor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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abstract = "Three dimensional unite clement method (3D-FEM) simulations have been used to study the possibility of magnetic film utilization to make GHz frequency band inductors, A simple structure of a flat magnetic film above a spiral coil gained about 65% inductance increase. Granular type soft magnetic films showed the best results.",

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author = "Shiuji Tauabe and Yasuhiro Shiraki and Keuji Itoh and Masabiro Yamagiichi and Arai, {Keu Ichi}",

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AU - Shiraki, Yasuhiro

AU - Itoh, Keuji

AU - Yamagiichi, Masabiro

AU - Arai, Keu Ichi

PY - 1999

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KW - MMIC

KW - Soft magnetic films

KW - Thin film inductor

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