FEM analysis of thin-film inductors used in GHz frequency bands

Shinji Tanabe, Yasuhiro Shiraki, Kenji Ito, Masahiro Yamaguchi, Ken ichi Arai

Research output: Contribution to journalConference articlepeer-review


A three dimensional finite element method (3D-FEM) simulations have been used to study the possibility of magnetic film utilization to make GHz frequency band inductors. A simple structure of a flat magnetic film above a spiral coil gained about 65% inductance increase. Granular type soft magnetic films showed the best results.

Original languageEnglish
Pages (from-to)GR-13
JournalDigests of the Intermag Conference
Publication statusPublished - 1999 Dec 1
Externally publishedYes
EventProceedings of the 1999 IEEE International Magnetics Conference 'Digest of Intermag 99' - Kyongju, South Korea
Duration: 1999 May 181999 May 21

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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