Feedback mode-based electrochemical imaging of conductivity and topography for large substrate surfaces using an LSI-based amperometric chip device with 400 sensors

Yusuke Kanno, Kosuke Ino, Kumi Y. Inoue, Mustafa Şen, Atsushi Suda, Ryota Kunikata, Masahki Matsudaira, Hiroya Abe, Chen Zhong Li, Hitoshi Shiku, Tomokazu Matsue

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

Abstract

Feedback mode-based electrochemical imaging of conductivity and topography for large substrate surfaces is presented using a large-scale integration (LSI)-based amperometric chip device with 400 sensors at a pitch of 250 μm. The LSI-based chip device has enabled rapid electrochemical imaging of large substrate surfaces, compared to scanning electrochemical microscope (SECM). Substrates modified with conductive and insulating materials were placed onto the device to acquire electrochemical signals from the substrate surface using positive and negative feedback signals. The conductivity and topography of the substrate were successfully imaged, indicating that the feedback mode-based electrochemical imaging with such a device is useful to characterize large-area substrate surfaces.

Original languageEnglish
Pages (from-to)109-113
Number of pages5
JournalJournal of Electroanalytical Chemistry
Volume741
DOIs
Publication statusPublished - 2015 Mar 15

Keywords

  • Chip device
  • Electrochemical imaging
  • Electrode array
  • Feedback mode-based electrochemical detection
  • LSI-based amperometric sensor

ASJC Scopus subject areas

  • Analytical Chemistry
  • Chemical Engineering(all)
  • Electrochemistry

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