TY - JOUR
T1 - Feedback control of thin film PZT MEMS actuator with integrated buried piezoresistors
AU - Vergara, Andrea
AU - Tsukamoto, Takashiro
AU - Fang, Weileun
AU - Tanaka, Shuji
N1 - Funding Information:
This study was supported by JSPS Grant-in-Aid for Scientific Research (B) No. 18H01390 . Andrea Vergara was supported by Tohoku University GP-Mech Program.
Publisher Copyright:
© 2021
PY - 2021/12/1
Y1 - 2021/12/1
N2 - In this paper, a thin film PZT MEMS actuator feedback controlled with integrated buried piezoresistors is reported. Two PID controllers were used to implement a phase-locked loop (PLL) with automatic gain control (AGC). The amplitude of the device could be precisely controlled by using the buried piezoresistors. The proposed fabrication process was compatible with both components. The positioning accuracy and drift as small as 5 ppm and 95 ppb/min, respectively, could be obtained by the proposed system. In addition, the bias stability and the white noise were reduced by 90%. The results presented here show significant improvement of the precision and stability of the PZT-based device.
AB - In this paper, a thin film PZT MEMS actuator feedback controlled with integrated buried piezoresistors is reported. Two PID controllers were used to implement a phase-locked loop (PLL) with automatic gain control (AGC). The amplitude of the device could be precisely controlled by using the buried piezoresistors. The proposed fabrication process was compatible with both components. The positioning accuracy and drift as small as 5 ppm and 95 ppb/min, respectively, could be obtained by the proposed system. In addition, the bias stability and the white noise were reduced by 90%. The results presented here show significant improvement of the precision and stability of the PZT-based device.
KW - Buried piezoresistor
KW - Feedback control
KW - Thin film PZT actuator
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U2 - 10.1016/j.sna.2021.113131
DO - 10.1016/j.sna.2021.113131
M3 - Article
AN - SCOPUS:85116361888
VL - 332
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
SN - 0924-4247
M1 - 113131
ER -