Feedback control of thin film PZT MEMS actuator with integrated buried piezoresistors

Andrea Vergara, Takashiro Tsukamoto, Weileun Fang, Shuji Tanaka

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, a thin film PZT MEMS actuator feedback controlled with integrated buried piezoresistors is reported. Two PID controllers were used to implement a phase-locked loop (PLL) with automatic gain control (AGC). The amplitude of the device could be precisely controlled by using the buried piezoresistors. The proposed fabrication process was compatible with both components. The positioning accuracy and drift as small as 5 ppm and 95 ppb/min, respectively, could be obtained by the proposed system. In addition, the bias stability and the white noise were reduced by 90%. The results presented here show significant improvement of the precision and stability of the PZT-based device.

Original languageEnglish
Article number113131
JournalSensors and Actuators, A: Physical
Volume332
DOIs
Publication statusPublished - 2021 Dec 1

Keywords

  • Buried piezoresistor
  • Feedback control
  • Thin film PZT actuator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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