Feasibility study of ultrasonic biometrics based on finger vessel imaging by epitaxial-PZT/Si piezoelectric micromachined ultrasonic transducer

Ziyi Liu, Shinya Yoshida, Toshiaki Horie, Shoji Okamoto, Ryoichi Takayama, Shuji Tanaka

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

In this study, we demonstrated a potential usability of a piezoelectric micromachined ultrasonic transducer (pMUT) for a high-performance body-coupled ultrasonic imager based on an epitaxial lead zirconate titanate (Epi-PZT) thin film. A finger vessel biometrics was proposed as one of its applications. At first, transmitting abilities and receiving sensitivities of the single-element pMUT based on Epitaxial-PZT (Epi-PZT) and polycrystalline-PZT (Poly-PZT) were evaluated as a fundamental study. It was experimentally verified that the Epi-PZT was a preferable material for a higher performance pMUT. Then, the linear array driven by a commercially-available pulser board was constructed, and successfully formed a focused ultrasonic beam. Finally, we demonstrated the ultrasonic imaging of a polydimethylsiloxane-based phantom by using the Epi-PZT pMUT array. We believe this achievement is a great step to realize the finger vessel biometric by pMUT.

Original languageEnglish
Article number112145
JournalSensors and Actuators, A: Physical
Volume312
DOIs
Publication statusPublished - 2020 Sep 1

Keywords

  • Beamforming
  • Epitaxial PZT thin film
  • Ultrasonic image
  • pMUT

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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