Feasibility study for development of a carbon-based MEMS/NEMS using HOPG and a MEMS fabrication process

Junji Sone; Kentaro Totsu

doi:10.1109/NANO.2013.6720799

Feasibility study for development of a carbon-based MEMS/NEMS using HOPG and a MEMS fabrication process

Junji Sone, Kentaro Totsu

Micro System Integration Center (μSIC)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We aim to develop a process technology for constructing a carbon MEMS/NEMS device using HOPG without a high-temperature and high-energy process. An HOPG micro-sheet was prepared by exfoliation. In addition, the cantilevers and double-clamped beams were patterned using a photoresist. The HOPG micro-sheet was adhered using a tantalum layer. We succeeded in the fabrication of cantilevers and double-clamped beams by controlling the thickness and surface roughness of the HOPG micro-sheet. The measured first resonance frequency of the constructed cantilever was near graphite property. We plan to develop more precise nano-scale devices in the future.

Original language	English
Title of host publication	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Pages	1018-1021
Number of pages	4
DOIs	https://doi.org/10.1109/NANO.2013.6720799
Publication status	Published - 2013
Event	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 - Beijing, China Duration: 2013 Aug 5 → 2013 Aug 8

Publication series

Name	Proceedings of the IEEE Conference on Nanotechnology
ISSN (Print)	1944-9399
ISSN (Electronic)	1944-9380

Other

Other	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Country/Territory	China
City	Beijing
Period	13/8/5 → 13/8/8

ASJC Scopus subject areas

Bioengineering
Electrical and Electronic Engineering
Materials Chemistry
Condensed Matter Physics

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10.1109/NANO.2013.6720799

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Feasibility study for development of a carbon-based MEMS/NEMS using HOPG and a MEMS fabrication process. / Sone, Junji; Totsu, Kentaro.

2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013. 2013. p. 1018-1021 6720799 (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sone, J & Totsu, K 2013, Feasibility study for development of a carbon-based MEMS/NEMS using HOPG and a MEMS fabrication process. in 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013., 6720799, Proceedings of the IEEE Conference on Nanotechnology, pp. 1018-1021, 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013, Beijing, China, 13/8/5. https://doi.org/10.1109/NANO.2013.6720799

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Feasibility study for development of a carbon-based MEMS/NEMS using HOPG and a MEMS fabrication process

Abstract

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