TY - GEN
T1 - Feasibility study for development of a carbon-based MEMS/NEMS using HOPG and a MEMS fabrication process
AU - Sone, Junji
AU - Totsu, Kentaro
PY - 2013
Y1 - 2013
N2 - We aim to develop a process technology for constructing a carbon MEMS/NEMS device using HOPG without a high-temperature and high-energy process. An HOPG micro-sheet was prepared by exfoliation. In addition, the cantilevers and double-clamped beams were patterned using a photoresist. The HOPG micro-sheet was adhered using a tantalum layer. We succeeded in the fabrication of cantilevers and double-clamped beams by controlling the thickness and surface roughness of the HOPG micro-sheet. The measured first resonance frequency of the constructed cantilever was near graphite property. We plan to develop more precise nano-scale devices in the future.
AB - We aim to develop a process technology for constructing a carbon MEMS/NEMS device using HOPG without a high-temperature and high-energy process. An HOPG micro-sheet was prepared by exfoliation. In addition, the cantilevers and double-clamped beams were patterned using a photoresist. The HOPG micro-sheet was adhered using a tantalum layer. We succeeded in the fabrication of cantilevers and double-clamped beams by controlling the thickness and surface roughness of the HOPG micro-sheet. The measured first resonance frequency of the constructed cantilever was near graphite property. We plan to develop more precise nano-scale devices in the future.
UR - http://www.scopus.com/inward/record.url?scp=84894123544&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84894123544&partnerID=8YFLogxK
U2 - 10.1109/NANO.2013.6720799
DO - 10.1109/NANO.2013.6720799
M3 - Conference contribution
AN - SCOPUS:84894123544
SN - 9781479906758
T3 - Proceedings of the IEEE Conference on Nanotechnology
SP - 1018
EP - 1021
BT - 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
T2 - 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Y2 - 5 August 2013 through 8 August 2013
ER -