Feasibility study for development of a carbon-based MEMS/NEMS using HOPG and a MEMS fabrication process

Junji Sone, Kentaro Totsu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We aim to develop a process technology for constructing a carbon MEMS/NEMS device using HOPG without a high-temperature and high-energy process. An HOPG micro-sheet was prepared by exfoliation. In addition, the cantilevers and double-clamped beams were patterned using a photoresist. The HOPG micro-sheet was adhered using a tantalum layer. We succeeded in the fabrication of cantilevers and double-clamped beams by controlling the thickness and surface roughness of the HOPG micro-sheet. The measured first resonance frequency of the constructed cantilever was near graphite property. We plan to develop more precise nano-scale devices in the future.

Original languageEnglish
Title of host publication2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Pages1018-1021
Number of pages4
DOIs
Publication statusPublished - 2013 Dec 1
Event2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 - Beijing, China
Duration: 2013 Aug 52013 Aug 8

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
ISSN (Print)1944-9399
ISSN (Electronic)1944-9380

Other

Other2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
CountryChina
CityBeijing
Period13/8/513/8/8

ASJC Scopus subject areas

  • Bioengineering
  • Electrical and Electronic Engineering
  • Materials Chemistry
  • Condensed Matter Physics

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