TY - GEN
T1 - FE-B-NB-ND magnetic metallic glass thin film for MEMS/NEMS structure
AU - Phan, T. A.
AU - Lee, S. M.
AU - Makino, Akihiro
AU - Oguchi, Hiroyuki
AU - Kuwano, Hiroki
PY - 2011/4/13
Y1 - 2011/4/13
N2 - This paper presents characteristics of Fe-B-Nb-Nd magnetic metallic glass thin film (MGTF) which is greatly desired for MEMS/NEMS devices. The advantages of the Fe-B-Nb-Nd MGTF include high robustness and soft magnetic property. In our study, we have measured the film characteristics such as structure, surface morphology, hardness, elastic modulus, internal stress, and soft magnetic property. We also report a fabrication process of freestanding micro-cantilevers using this Fe-B-Nb-Nd MGTF for a vibration based micro energy harvester by micromachining techniques.
AB - This paper presents characteristics of Fe-B-Nb-Nd magnetic metallic glass thin film (MGTF) which is greatly desired for MEMS/NEMS devices. The advantages of the Fe-B-Nb-Nd MGTF include high robustness and soft magnetic property. In our study, we have measured the film characteristics such as structure, surface morphology, hardness, elastic modulus, internal stress, and soft magnetic property. We also report a fabrication process of freestanding micro-cantilevers using this Fe-B-Nb-Nd MGTF for a vibration based micro energy harvester by micromachining techniques.
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U2 - 10.1109/MEMSYS.2011.5734453
DO - 10.1109/MEMSYS.2011.5734453
M3 - Conference contribution
AN - SCOPUS:79953774378
SN - 9781424496327
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 428
EP - 431
BT - 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
T2 - 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Y2 - 23 January 2011 through 27 January 2011
ER -