TY - GEN
T1 - Fe-B-Nb-Nd magnetic metallic glass thin film for MEMS and NEMS
AU - Phan, Tuan A.
AU - Lee, Sangmin
AU - Makino, Akihiro
AU - Okamoto, Hiroshi
AU - Kuwano, Hiroki
PY - 2010/11/29
Y1 - 2010/11/29
N2 -
In MEMS/NEMS applications, it is always desirable to have materials with good mechanical properties such as high strength and corrosion resistance. Metallic glass thin films are known to exhibit such properties. Here we report on properties of magnetic metallic glass (Fe
0.72
B
0.24
Nb
0.04
)
(100-x)
Nd
x
(4≤x≤8) thin films formed by electron cyclotron resonance (ECR) ion-beam sputtering. The atomic composition of the thin film is controllable by changing the number of (Fe
0.70
B
0.26
Nb
0.04
)
80
Nd
20
'chips' combined with a Fe
72
B
24
Nb
4
main target. The glass transition temperature (T
g
), the crystallization temperature (T
x
) and the supercooled liquid region (ΔT
x
) are found to be 850 K, 946 K and 96 K, respectively. An atomically disordered structure was observed by X-ray diffraction, electron diffraction and high resolution transmission electron microscopy. The pristine thin film is found to be a soft magnetic material at room temperature. A 5 μm - thick cantilever was fabricated by using MEMS fabrication technology. We envision its use as a part of microelectric-power generator based on electromagnetic induction effect.
AB -
In MEMS/NEMS applications, it is always desirable to have materials with good mechanical properties such as high strength and corrosion resistance. Metallic glass thin films are known to exhibit such properties. Here we report on properties of magnetic metallic glass (Fe
0.72
B
0.24
Nb
0.04
)
(100-x)
Nd
x
(4≤x≤8) thin films formed by electron cyclotron resonance (ECR) ion-beam sputtering. The atomic composition of the thin film is controllable by changing the number of (Fe
0.70
B
0.26
Nb
0.04
)
80
Nd
20
'chips' combined with a Fe
72
B
24
Nb
4
main target. The glass transition temperature (T
g
), the crystallization temperature (T
x
) and the supercooled liquid region (ΔT
x
) are found to be 850 K, 946 K and 96 K, respectively. An atomically disordered structure was observed by X-ray diffraction, electron diffraction and high resolution transmission electron microscopy. The pristine thin film is found to be a soft magnetic material at room temperature. A 5 μm - thick cantilever was fabricated by using MEMS fabrication technology. We envision its use as a part of microelectric-power generator based on electromagnetic induction effect.
KW - Cantilever
KW - Fe-based metallic glass
KW - Glass forming ability
KW - MEMS
KW - Metallic glass thin film
KW - NEMS
UR - http://www.scopus.com/inward/record.url?scp=78649239576&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=78649239576&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2010.5592456
DO - 10.1109/NEMS.2010.5592456
M3 - Conference contribution
AN - SCOPUS:78649239576
SN - 9781424465439
T3 - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
SP - 541
EP - 544
BT - 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
T2 - 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Y2 - 20 January 2010 through 23 January 2010
ER -