Fe-B-Nb-Nd magnetic metallic glass thin film for MEMS and NEMS

Tuan A. Phan, Sangmin Lee, Akihiro Makino, Hiroshi Okamoto, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In MEMS/NEMS applications, it is always desirable to have materials with good mechanical properties such as high strength and corrosion resistance. Metallic glass thin films are known to exhibit such properties. Here we report on properties of magnetic metallic glass (Fe 0.72 B 0.24 Nb 0.04 ) (100-x) Nd x (4≤x≤8) thin films formed by electron cyclotron resonance (ECR) ion-beam sputtering. The atomic composition of the thin film is controllable by changing the number of (Fe 0.70 B 0.26 Nb 0.04 ) 80 Nd 20 'chips' combined with a Fe 72 B 24 Nb 4 main target. The glass transition temperature (T g ), the crystallization temperature (T x ) and the supercooled liquid region (ΔT x ) are found to be 850 K, 946 K and 96 K, respectively. An atomically disordered structure was observed by X-ray diffraction, electron diffraction and high resolution transmission electron microscopy. The pristine thin film is found to be a soft magnetic material at room temperature. A 5 μm - thick cantilever was fabricated by using MEMS fabrication technology. We envision its use as a part of microelectric-power generator based on electromagnetic induction effect.

Original languageEnglish
Title of host publication2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages541-544
Number of pages4
DOIs
Publication statusPublished - 2010 Nov 29
Event5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China
Duration: 2010 Jan 202010 Jan 23

Publication series

Name2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Other

Other5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Country/TerritoryChina
CityXiamen
Period10/1/2010/1/23

Keywords

  • Cantilever
  • Fe-based metallic glass
  • Glass forming ability
  • MEMS
  • Metallic glass thin film
  • NEMS

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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