Wire antenna used for plasma process was analyzed using finite difference time domain (FDTD) method. Considering the ion sheath around antenna conductor, the numerical results of the input impedance agreed with the experimental data. The return loss and field distribution were found to be improved by the presence of the ion sheath.
|Number of pages||4|
|Journal||IEEE Antennas and Propagation Society, AP-S International Symposium (Digest)|
|Publication status||Published - 2001 Jan 1|
ASJC Scopus subject areas
- Electrical and Electronic Engineering