FDTD analysis of wire antenna used for process plasma

Hiroyasu Sato, Katsuaki Tamashiro, Kunio Sawaya, Tomoko Takagi, Masashi Ueda, Yoshimi Watabe

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

Wire antenna used for plasma process was analyzed using finite difference time domain (FDTD) method. Considering the ion sheath around antenna conductor, the numerical results of the input impedance agreed with the experimental data. The return loss and field distribution were found to be improved by the presence of the ion sheath.

Original languageEnglish
Pages (from-to)561-564
Number of pages4
JournalIEEE Antennas and Propagation Society, AP-S International Symposium (Digest)
Volume3
DOIs
Publication statusPublished - 2001 Jan 1

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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