Fatigue of micromachined stainless steel structural materials for vibrational energy harvesting

Y. Shimizu, L. Van Minh, H. Kitayoshi, H. Kuwano

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)

Abstract

This work presents fatigue measurement for micromachined stainless steel (SUS304) structural substrate using resonant bending mode. Micromachined specimens for fatigue test had a cantilever structure with a proof mass. They were fabricated by FeCl3 wet etching and wire-discharged cutting. The SUS specimens had Young's modulus of 198 GPa on average. The endurance limit of micromachined specimens was 213 MPa on average after 108 cycles under our fracture definition. The large SUS specimens had the endurance limit of 229 MPa after 107 cycles.

Original languageEnglish
Article number012116
JournalJournal of Physics: Conference Series
Volume773
Issue number1
DOIs
Publication statusPublished - 2016 Dec 14
Event16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2016 - Paris, France
Duration: 2016 Dec 62016 Dec 9

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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