Fast evaluation of period deviation and flatness of a linear scale by using a fizeau interferometer

Woo Jae Kim, Yuki Shimizu, Akihide Kimura, Wei Gao

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

A reflective-type linear scale with a pitch of 1.67 μm used in an interferential scanning-type 2-DOF linear encoder is evaluated by the Fizeau interferometer with a measurement range of 100 mm. The 2-DOF linear encoder produces 2-axis position signals based on the interference between the X-directional positive and negative first-order diffracted beams from the linear scale. Firstly, the Z-directional flatness eZ(x,y) of the linear scale is evaluated from the wavefront of the zero-order diffracted beam reflected from the linear scale. The linear scale is then tilted to align the axes of the first-order diffracted beams with that of the interferometer so that the X-directional period deviation eX(x,y)of the linear scale can be evaluated from the wavefronts of the X-directional positive and negative first--order diffracted beams. Finally, the Z-directional flatness eZ(x,y) and X-directional period deviation eX(x,y) were verified by comparing those with the nonlinear components of the 2-DOF linear encoder using the evaluated linear scale.

Original languageEnglish
Pages (from-to)1517-1524
Number of pages8
JournalInternational Journal of Precision Engineering and Manufacturing
Volume13
Issue number9
DOIs
Publication statusPublished - 2012 Sep

Keywords

  • Fizeau interferometer
  • Flatness
  • Linear encoder
  • Linear scale
  • Period deviation

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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