@inproceedings{17585c57b60248a0b2e052853211ac7c,
title = "Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique",
abstract = "In this paper, a Fizeau interferometer is used to evaluate the out-of-flatness error and the pitch deviation of a reflective-type linear scale. The out-of-flatness error of the linear scale is evaluated by analyzing the zeroth-order diffracted beam and the positive and negative first-order diffracted beams are measured to evaluate the pitch deviation of the linear scale. Basic stitching technique is also studied and simulated to connect the phase map obtained by the sub-apertures.",
keywords = "Interferometry, Linear scale, Optical metrology",
author = "Xin Xiong and Hiraku Matsukuma and Xiuguo Chen and Yuki Shimizu and Wei Gao",
note = "Funding Information: This research was supported Promotion of Science (JSPS). Publisher Copyright: {\textcopyright} 2018 IEEE.; 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 ; Conference date: 16-11-2018 Through 18-11-2018",
year = "2019",
month = jan,
day = "16",
doi = "10.1109/AMCON.2018.8615000",
language = "English",
series = "Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "220--222",
editor = "Teen-Hang Meen",
booktitle = "Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018",
}