Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique

Xin Xiong; Hiraku Matsukuma; Xiuguo Chen; Yuki Shimizu; Wei Gao

doi:10.1109/AMCON.2018.8615000

Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique

Xin Xiong, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu, Wei Gao

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this paper, a Fizeau interferometer is used to evaluate the out-of-flatness error and the pitch deviation of a reflective-type linear scale. The out-of-flatness error of the linear scale is evaluated by analyzing the zeroth-order diffracted beam and the positive and negative first-order diffracted beams are measured to evaluate the pitch deviation of the linear scale. Basic stitching technique is also studied and simulated to connect the phase map obtained by the sub-apertures.

Original language	English
Title of host publication	Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
Editors	Teen-Hang Meen
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	220-222
Number of pages	3
ISBN (Electronic)	9781538656099
DOIs	https://doi.org/10.1109/AMCON.2018.8615000
Publication status	Published - 2019 Jan 16
Event	2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 - Yunlin, Taiwan, Province of China Duration: 2018 Nov 16 → 2018 Nov 18

Publication series

Name	Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

Conference

Conference	2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
Country/Territory	Taiwan, Province of China
City	Yunlin
Period	18/11/16 → 18/11/18

Keywords

Interferometry
Linear scale
Optical metrology

ASJC Scopus subject areas

Biomedical Engineering
Mechanics of Materials
Safety, Risk, Reliability and Quality
Management, Monitoring, Policy and Law
Education
Fluid Flow and Transfer Processes
Industrial and Manufacturing Engineering

Access to Document

10.1109/AMCON.2018.8615000

Cite this

Xiong, X., Matsukuma, H., Chen, X., Shimizu, Y., & Gao, W. (2019). Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique. In T-H. Meen (Ed.), Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 (pp. 220-222). [8615000] (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/AMCON.2018.8615000

Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique. / Xiong, Xin; Matsukuma, Hiraku; Chen, Xiuguo; Shimizu, Yuki ; Gao, Wei.

Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018. ed. / Teen-Hang Meen. Institute of Electrical and Electronics Engineers Inc., 2019. p. 220-222 8615000 (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Xiong, X, Matsukuma, H, Chen, X, Shimizu, Y & Gao, W 2019, Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique. in T-H Meen (ed.), Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018., 8615000, Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, Institute of Electrical and Electronics Engineers Inc., pp. 220-222, 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, Yunlin, Taiwan, Province of China, 18/11/16. https://doi.org/10.1109/AMCON.2018.8615000

Xiong X, Matsukuma H, Chen X, Shimizu Y , Gao W. Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique. In Meen T-H, editor, Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018. Institute of Electrical and Electronics Engineers Inc. 2019. p. 220-222. 8615000. (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018). https://doi.org/10.1109/AMCON.2018.8615000

Xiong, Xin ; Matsukuma, Hiraku ; Chen, Xiuguo ; Shimizu, Yuki ; Gao, Wei. / Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique. Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018. editor / Teen-Hang Meen. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 220-222 (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018).

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title = "Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique",

abstract = "In this paper, a Fizeau interferometer is used to evaluate the out-of-flatness error and the pitch deviation of a reflective-type linear scale. The out-of-flatness error of the linear scale is evaluated by analyzing the zeroth-order diffracted beam and the positive and negative first-order diffracted beams are measured to evaluate the pitch deviation of the linear scale. Basic stitching technique is also studied and simulated to connect the phase map obtained by the sub-apertures.",

keywords = "Interferometry, Linear scale, Optical metrology",

author = "Xin Xiong and Hiraku Matsukuma and Xiuguo Chen and Yuki Shimizu and Wei Gao",

note = "Funding Information: This research was supported Promotion of Science (JSPS). Publisher Copyright: {\textcopyright} 2018 IEEE.; 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 ; Conference date: 16-11-2018 Through 18-11-2018",

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N2 - In this paper, a Fizeau interferometer is used to evaluate the out-of-flatness error and the pitch deviation of a reflective-type linear scale. The out-of-flatness error of the linear scale is evaluated by analyzing the zeroth-order diffracted beam and the positive and negative first-order diffracted beams are measured to evaluate the pitch deviation of the linear scale. Basic stitching technique is also studied and simulated to connect the phase map obtained by the sub-apertures.

AB - In this paper, a Fizeau interferometer is used to evaluate the out-of-flatness error and the pitch deviation of a reflective-type linear scale. The out-of-flatness error of the linear scale is evaluated by analyzing the zeroth-order diffracted beam and the positive and negative first-order diffracted beams are measured to evaluate the pitch deviation of the linear scale. Basic stitching technique is also studied and simulated to connect the phase map obtained by the sub-apertures.

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BT - Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

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Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique

Abstract

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Keywords

ASJC Scopus subject areas

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