Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique

Xin Xiong, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, a Fizeau interferometer is used to evaluate the out-of-flatness error and the pitch deviation of a reflective-type linear scale. The out-of-flatness error of the linear scale is evaluated by analyzing the zeroth-order diffracted beam and the positive and negative first-order diffracted beams are measured to evaluate the pitch deviation of the linear scale. Basic stitching technique is also studied and simulated to connect the phase map obtained by the sub-apertures.

Original languageEnglish
Title of host publicationProceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
EditorsTeen-Hang Meen
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages220-222
Number of pages3
ISBN (Electronic)9781538656099
DOIs
Publication statusPublished - 2019 Jan 16
Event2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 - Yunlin, Taiwan, Province of China
Duration: 2018 Nov 162018 Nov 18

Publication series

NameProceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

Conference

Conference2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
CountryTaiwan, Province of China
CityYunlin
Period18/11/1618/11/18

Keywords

  • Interferometry
  • Linear scale
  • Optical metrology

ASJC Scopus subject areas

  • Biomedical Engineering
  • Mechanics of Materials
  • Safety, Risk, Reliability and Quality
  • Management, Monitoring, Policy and Law
  • Education
  • Fluid Flow and Transfer Processes
  • Industrial and Manufacturing Engineering

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  • Cite this

    Xiong, X., Matsukuma, H., Chen, X., Shimizu, Y., & Gao, W. (2019). Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique. In T-H. Meen (Ed.), Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 (pp. 220-222). [8615000] (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/AMCON.2018.8615000