Fast epitaxial growth of a-axis- and c-axis-oriented YBa 2 Cu 3 O 7-δ films on (1 0 0) LaAlO 3 substrate by laser chemical vapor deposition

Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

a-axis- and c-axis-oriented YBa 2 Cu 3 O 7-δ (YBCO) films were epitaxially grown on (1 0 0) LaAlO 3 substrates by laser chemical vapor deposition. The preferred orientation in the YBCO film changed from the a-axis to the c-axis with increasing laser powers from 77 to 158 W (the deposition temperatures from 951 to 1087 K). The a-axis-oriented YBCO film showed in-plane epitaxial growth of YBCO [0 0 1]//LAO [0 0 1], and the c-axis-oriented YBCO film showed that of YBCO [0 1 0]//LAO [0 0 1]. A c-axis-oriented YBCO film with a high critical temperature of 90 K was prepared at a deposition rate of 90 μm h -1 , about 2-1000 times higher than that of metalorganic chemical vapor deposition.

Original languageEnglish
Pages (from-to)4317-4320
Number of pages4
JournalApplied Surface Science
Volume257
Issue number9
DOIs
Publication statusPublished - 2011 Feb 15

Keywords

  • High critical temperature
  • High deposition rate
  • Laser chemical vapor deposition

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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