@article{077d5830eb4e43c1a2e256443e50ff69,
title = "Fast Atom Beam Process Techniques",
keywords = "deposition, etching, fast atom beam, insulator, patterning, solid lubricant, thin film",
author = "Hiroki Kuwano",
year = "1989",
month = jan,
day = "1",
doi = "10.2493/jjspe.55.265",
language = "English",
volume = "55",
pages = "265--269",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "2",
}