Fast Atom Beam Process Techniques

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)265-269
Number of pages5
JournalJournal of the Japan Society for Precision Engineering
Volume55
Issue number2
DOIs
Publication statusPublished - 1989 Jan 1
Externally publishedYes

Keywords

  • deposition
  • etching
  • fast atom beam
  • insulator
  • patterning
  • solid lubricant
  • thin film

ASJC Scopus subject areas

  • Mechanical Engineering

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