Fast atom beam process techniques

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)23-27
Number of pages5
JournalJ. JAPAN SOCIETY PRECISION ENGINEERING
Volume55
Issue number2
Publication statusPublished - 1989 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Mechanical Engineering

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