Fast atom beam process techniques

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	23-27
Number of pages	5
Journal	J. JAPAN SOCIETY PRECISION ENGINEERING
Volume	55
Issue number	2
Publication status	Published - 1989 Jan 1
Externally published	Yes

ASJC Scopus subject areas

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title = "Fast atom beam process techniques",

author = "H. Kuwano",

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