TY - JOUR
T1 - Fast and accurate shape measurement system utilizing the fringe projection method with a ferroelectric liquid-crystal-on-silicon microdisplay
AU - Ri, Shien
AU - Muramatsu, Takashi
AU - Saka, Masumi
AU - Tanaka, Hiroyuki
N1 - Funding Information:
This work was partly supported by the Grant-in-Aid for Young Scientists (B) 22760071. The authors appreciate Mr. Toshiaki Watanabe at Sumitomo Bakelite Co., Ltd. for his assistance in the measuring of the height distribution of the step-specimen using the laser focus sensor, which allowed us to measure the accuracy of our device.
PY - 2012/8
Y1 - 2012/8
N2 - The performance of the fringe projection system, including image quality, nonlinearity of the projected intensity, stability, and switching time for multiple phase-shifted patterns, is essential for fast and accurate shape measurement. A fast and accurate measurement system using a ferroelectric liquid-crystal-on-silicon microdisplay and a high-powered light emitting diode light source is developed. Our results indicate that the nonlinearity of the projected intensity and the stability of the fringe projection were dramatically improved compared with an ordinary commercial liquid crystal display projector. The rapid measurement of the warpage distribution of a flip chip ball grid array electronic package was performed by using the developed system. Nine phase-shifted fringe images with a resolution of 1280 960 pixels were recorded in 1.6 s. In addition, the measurement results obtained by our system agreed well with the results obtained from a micrometer and laser focus sensor. The average error was 2.6 μm, and the standard deviation was less than 10 μm with a 6-mm measurement range. C 2012 Society of Photo-Optical Instrumentation Engineers (SPIE).
AB - The performance of the fringe projection system, including image quality, nonlinearity of the projected intensity, stability, and switching time for multiple phase-shifted patterns, is essential for fast and accurate shape measurement. A fast and accurate measurement system using a ferroelectric liquid-crystal-on-silicon microdisplay and a high-powered light emitting diode light source is developed. Our results indicate that the nonlinearity of the projected intensity and the stability of the fringe projection were dramatically improved compared with an ordinary commercial liquid crystal display projector. The rapid measurement of the warpage distribution of a flip chip ball grid array electronic package was performed by using the developed system. Nine phase-shifted fringe images with a resolution of 1280 960 pixels were recorded in 1.6 s. In addition, the measurement results obtained by our system agreed well with the results obtained from a micrometer and laser focus sensor. The average error was 2.6 μm, and the standard deviation was less than 10 μm with a 6-mm measurement range. C 2012 Society of Photo-Optical Instrumentation Engineers (SPIE).
KW - Ferroelectric liquid-crystal-on-silicon microdisplay
KW - Fringe projection
KW - Phase-shifting technique
KW - Shape measurement
UR - http://www.scopus.com/inward/record.url?scp=84884288240&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84884288240&partnerID=8YFLogxK
U2 - 10.1117/1.OE.51.8.081506
DO - 10.1117/1.OE.51.8.081506
M3 - Article
AN - SCOPUS:84884288240
VL - 51
JO - Optical Engineering
JF - Optical Engineering
SN - 0091-3286
IS - 8
M1 - 081506
ER -