Far-infrared-light shadowgraphy for high extraction efficiency of extreme ultraviolet light from a CO2-laser-generated tin plasma

Hiraku Matsukuma, Tatsuya Hosoda, Yosuke Suzuki, Akifumi Yogo, Tatsuya Yanagida, Takeshi Kodama, Hiroaki Nishimura

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The two-color, double-pulse method is an efficient scheme to generate extreme ultraviolet light for fabricating the next generation semiconductor microchips. In this method, a Nd:YAG laser pulse is used to expand a several-tens-of-micrometers-scale tin droplet, and a CO2 laser pulse is subsequently directed at the expanded tin vapor after an appropriate delay time. We propose the use of shadowgraphy with a CO2 laser probe-pulse scheme to optimize the CO2 main-drive laser. The distribution of absorption coefficients is derived from the experiment, and the results are converted to a practical absorption rate for the CO2 main-drive laser.

Original languageEnglish
Article number051104
JournalApplied Physics Letters
Volume109
Issue number5
DOIs
Publication statusPublished - 2016 Aug 1

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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