Factors influencing the variation of surface acoustic wave velocity in lithium tetraborate

Vincent Vezin; Shinichiro Inui; Kunio Yamaguchi; Tamotsu Sugawara; Ryuichi Komatsu; Satoshi Uda; Kazuhiko Yamanouchi

Factors influencing the variation of surface acoustic wave velocity in lithium tetraborate

Vincent Vezin, Shinichiro Inui, Kunio Yamaguchi, Tamotsu Sugawara, Ryuichi Komatsu, Satoshi Uda, Kazuhiko Yamanouchi

Research output: Contribution to journal › Article › peer-review

Abstract

Comparison of the resonance frequency of surface acoustic wave (SAW) resonators fabricated on defect-free and highly defective lithium tetraborate wafers was attempted. The intrinsic variation of SAW velocity due to crystal defects, impurities and chemical compositional inhomogeneities for lithium tetraborate wafers is smaller than ±0.011%. In addition, the variation of SAW velocity in a wafer is influenced by the device fabrication process rather than the lithium tetraborate substrate quality.

Original language	English
Pages (from-to)	3074-3075
Number of pages	2
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	36
Issue number	5 SUPPL. B
Publication status	Published - 1997 May 1
Externally published	Yes

Keywords

Crystalline defects
Impurity
Lithium tetraborate
SAW resonator
SAW velocity

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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Factors influencing the variation of surface acoustic wave velocity in lithium tetraborate. / Vezin, Vincent; Inui, Shinichiro; Yamaguchi, Kunio; Sugawara, Tamotsu; Komatsu, Ryuichi; Uda, Satoshi; Yamanouchi, Kazuhiko.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 36, No. 5 SUPPL. B, 01.05.1997, p. 3074-3075.

Research output: Contribution to journal › Article › peer-review

Vezin, Vincent ; Inui, Shinichiro ; Yamaguchi, Kunio ; Sugawara, Tamotsu ; Komatsu, Ryuichi ; Uda, Satoshi ; Yamanouchi, Kazuhiko. / Factors influencing the variation of surface acoustic wave velocity in lithium tetraborate. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 1997 ; Vol. 36, No. 5 SUPPL. B. pp. 3074-3075.

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AU - Uda, Satoshi

AU - Yamanouchi, Kazuhiko

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