Factors influencing the variation of surface acoustic wave velocity in lithium tetraborate

Vincent Vezin, Shinichiro Inui, Kunio Yamaguchi, Tamotsu Sugawara, Ryuichi Komatsu, Satoshi Uda, Kazuhiko Yamanouchi

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Comparison of the resonance frequency of surface acoustic wave (SAW) resonators fabricated on defect-free and highly defective lithium tetraborate wafers was attempted. The intrinsic variation of SAW velocity due to crystal defects, impurities and chemical compositional inhomogeneities for lithium tetraborate wafers is smaller than ±0.011%. In addition, the variation of SAW velocity in a wafer is influenced by the device fabrication process rather than the lithium tetraborate substrate quality.

Original languageEnglish
Pages (from-to)3074-3075
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume36
Issue number5 SUPPL. B
Publication statusPublished - 1997 May 1
Externally publishedYes

Keywords

  • Crystalline defects
  • Impurity
  • Lithium tetraborate
  • SAW resonator
  • SAW velocity

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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