Abstract
A technique using the sudden change in the geometrical shape of an Al line is introduced for the effective accumulation of atoms and,therefore, the fabrication ofmicro materials by electromigration. The effectiveness of the present technique is verified by the formation of an Al microspherefrom a predefinedhole.According to a finite element analysis of this electrical-thermal problem, the physical mechanismgoverning the observed behaviorcan be attributed to a decrease in atomic fluxalong the electron flow direction, resulting from asudden change in geometry,in the small region surrounding the predefined hole.
| Original language | English |
|---|---|
| Pages (from-to) | 314-318 |
| Number of pages | 5 |
| Journal | Optoelectronics and Advanced Materials, Rapid Communications |
| Volume | 7 |
| Issue number | 3-4 |
| Publication status | Published - 2013 |
Keywords
- Al microsphere
- Atomic accumulation
- Atomic flux
- Electromigration
- Finite element analysis
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering