Fabricationof Al microspheres by electromigration using a metal line with a sudden change in geometrical shape

Faizul Mohammad Kamal, Yuan Li, Masumi Saka

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

A technique using the sudden change in the geometrical shape of an Al line is introduced for the effective accumulation of atoms and,therefore, the fabrication ofmicro materials by electromigration. The effectiveness of the present technique is verified by the formation of an Al microspherefrom a predefinedhole.According to a finite element analysis of this electrical-thermal problem, the physical mechanismgoverning the observed behaviorcan be attributed to a decrease in atomic fluxalong the electron flow direction, resulting from asudden change in geometry,in the small region surrounding the predefined hole.

Original languageEnglish
Pages (from-to)314-318
Number of pages5
JournalOptoelectronics and Advanced Materials, Rapid Communications
Volume7
Issue number3-4
Publication statusPublished - 2013

Keywords

  • Al microsphere
  • Atomic accumulation
  • Atomic flux
  • Electromigration
  • Finite element analysis

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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