Fabrication Technology of Quartz Glass Resonator Using Sacrificial Metal Support Structure

Muhammad Jehanzeb Khan, Takashiro Tsukamoto, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports an electromagnetically driven quartz glass micromachined ring resonator on a quartz glass substrate. The resonator was fabricated using Au-Au thermocompression bonding technique. Two types of Au structures were used: temporary supporting structures during fabrication process and permanent structure for anchoring. Time-controlled release process successfully removed the temporary Au support structures while the permanent anchor remained. The released quartz glass resonator, which has 55 μm thickness and 4 mm in diameter, was successfully oscillated by electromagnetic transduction at the resonant frequency of 26.8 KHz.

Original languageEnglish
Title of host publicationINERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728129839
DOIs
Publication statusPublished - 2020 Mar
Event7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020 - Hiroshima, Japan
Duration: 2020 Mar 232020 Mar 26

Publication series

NameINERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020
CountryJapan
CityHiroshima
Period20/3/2320/3/26

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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