Fabrication techniques for multilayer metalization and patterning, and surface mounting of components on cylindrical substrates for tube-shaped micro-tools

S. Goto, T. Matsunaga, J. J. Chen, W. Makishi, M. Esashi, Y. Haga

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Citations (Scopus)

Abstract

This paper reports fabrication techniques for multilayer microstructures and surface mounting of small components on cylindrical substrates for tube-shaped high-performance micro-tools. A cylindrical shape is an ideal shape for micro medical tools inserted temporarily or implanted in the human body. Miniaturization, multifunctional capabilities, and high-performance are required for these tools. Tubular lumens, which are useful for the insertion of medical tools and for the injection of drugs, are necessary for endoscopes and catheters. Micro-fabrication on cylindrical substrates meets these demands. Multilayer metallization and patterning, as well as three-dimensional resist patterning have been performed using maskless lithography techniques on glass tubes with 2 and 3 mm outer diameters. Using laser soldering techniques, a high-speed OP amp has been mounted on a multilayer circuit formed on a glass tube to amplify small signals from micro medical sensors. These techniques will realize multifunctional and high-performance tube-shaped micro medical tools with small diameters.

Original languageEnglish
Title of host publicationProceedings of 2006 International Conference on Microtechnologies in Medicine and Biology
Pages217-220
Number of pages4
DOIs
Publication statusPublished - 2006 Dec 1
Event2006 International Conference on Microtechnologies in Medicine and Biology - Okinawa, Japan
Duration: 2006 May 92006 May 12

Publication series

NameProceedings of 2006 International Conference on Microtechnologies in Medicine and Biology

Other

Other2006 International Conference on Microtechnologies in Medicine and Biology
CountryJapan
CityOkinawa
Period06/5/906/5/12

Keywords

  • Cylindrical substrates
  • Medical tools
  • Multilayer microstructures
  • Photolithography
  • Surface-mounting

ASJC Scopus subject areas

  • Biomedical Engineering
  • Electrical and Electronic Engineering
  • Medicine(all)

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