TY - GEN
T1 - Fabrication techniques for multilayer metalization and patterning, and surface mounting of components on cylindrical substrates for tube-shaped micro-tools
AU - Goto, S.
AU - Matsunaga, T.
AU - Chen, J. J.
AU - Makishi, W.
AU - Esashi, M.
AU - Haga, Y.
PY - 2006/12/1
Y1 - 2006/12/1
N2 - This paper reports fabrication techniques for multilayer microstructures and surface mounting of small components on cylindrical substrates for tube-shaped high-performance micro-tools. A cylindrical shape is an ideal shape for micro medical tools inserted temporarily or implanted in the human body. Miniaturization, multifunctional capabilities, and high-performance are required for these tools. Tubular lumens, which are useful for the insertion of medical tools and for the injection of drugs, are necessary for endoscopes and catheters. Micro-fabrication on cylindrical substrates meets these demands. Multilayer metallization and patterning, as well as three-dimensional resist patterning have been performed using maskless lithography techniques on glass tubes with 2 and 3 mm outer diameters. Using laser soldering techniques, a high-speed OP amp has been mounted on a multilayer circuit formed on a glass tube to amplify small signals from micro medical sensors. These techniques will realize multifunctional and high-performance tube-shaped micro medical tools with small diameters.
AB - This paper reports fabrication techniques for multilayer microstructures and surface mounting of small components on cylindrical substrates for tube-shaped high-performance micro-tools. A cylindrical shape is an ideal shape for micro medical tools inserted temporarily or implanted in the human body. Miniaturization, multifunctional capabilities, and high-performance are required for these tools. Tubular lumens, which are useful for the insertion of medical tools and for the injection of drugs, are necessary for endoscopes and catheters. Micro-fabrication on cylindrical substrates meets these demands. Multilayer metallization and patterning, as well as three-dimensional resist patterning have been performed using maskless lithography techniques on glass tubes with 2 and 3 mm outer diameters. Using laser soldering techniques, a high-speed OP amp has been mounted on a multilayer circuit formed on a glass tube to amplify small signals from micro medical sensors. These techniques will realize multifunctional and high-performance tube-shaped micro medical tools with small diameters.
KW - Cylindrical substrates
KW - Medical tools
KW - Multilayer microstructures
KW - Photolithography
KW - Surface-mounting
UR - http://www.scopus.com/inward/record.url?scp=35548931679&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=35548931679&partnerID=8YFLogxK
U2 - 10.1109/MMB.2006.251532
DO - 10.1109/MMB.2006.251532
M3 - Conference contribution
AN - SCOPUS:35548931679
SN - 1424403383
SN - 9781424403387
T3 - Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology
SP - 217
EP - 220
BT - Proceedings of 2006 International Conference on Microtechnologies in Medicine and Biology
T2 - 2006 International Conference on Microtechnologies in Medicine and Biology
Y2 - 9 May 2006 through 12 May 2006
ER -