Fabrication techniques for multilayer metalization and patterning, and surface mounting of components on cylindrical substrates for tube-shaped micro-tools

S. Goto, T. Matsunaga, J. J. Chen, W. Makishi, M. Esashi, Y. Haga

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Citations (Scopus)

Abstract

This paper reports fabrication techniques for multilayer microstructures and surface mounting of small components on cylindrical substrates for tube-shaped high-performance micro-tools. A cylindrical shape is an ideal shape for micro medical tools inserted temporarily or implanted in the human body. Miniaturization, multifunctional capabilities, and high-performance are required for these tools. Tubular lumens, which are useful for the insertion of medical tools and for the injection of drugs, are necessary for endoscopes and catheters. Micro-fabrication on cylindrical substrates meets these demands. Multilayer metallization and patterning, as well as three-dimensional resist patterning have been performed using maskless lithography techniques on glass tubes with 2 and 3 mm outer diameters. Using laser soldering techniques, a high-speed OP amp has been mounted on a multilayer circuit formed on a glass tube to amplify small signals from micro medical sensors. These techniques will realize multifunctional and high-performance tube-shaped micro medical tools with small diameters.

Original languageEnglish
Title of host publicationProceedings of 2006 International Conference on Microtechnologies in Medicine and Biology
Pages217-220
Number of pages4
DOIs
Publication statusPublished - 2006 Dec 1
Event2006 International Conference on Microtechnologies in Medicine and Biology - Okinawa, Japan
Duration: 2006 May 92006 May 12

Publication series

NameProceedings of 2006 International Conference on Microtechnologies in Medicine and Biology

Other

Other2006 International Conference on Microtechnologies in Medicine and Biology
Country/TerritoryJapan
CityOkinawa
Period06/5/906/5/12

Keywords

  • Cylindrical substrates
  • Medical tools
  • Multilayer microstructures
  • Photolithography
  • Surface-mounting

ASJC Scopus subject areas

  • Biomedical Engineering
  • Electrical and Electronic Engineering
  • Medicine(all)

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