Fabrication of ZnO films alloyed with LiGaO2 by rf-magnetron sputtering and their optical property

Takahisa Omata, Keizo Tanaka, Shinya Otsuka-Yao-matsuo

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11 Citations (Scopus)


The alloyed thin films of ZnO with LiGaO2 were fabricated by an rf-magnetron sputtering technique using the target materials with various LiGaO2 concentrations. After optimizing the deposition conditions, such as sputtering atmosphere, applied rf-power and pressure, we successfully obtained almost stoichiometric x(LiGaO2)1/2-(1-x)ZnO alloyed films. All the obtained films were identified as the simple wurtzite phase. An immiscible region of 0.5 < × < 0.85 was concluded on the basis of a clear discontinuity in the variation of the lattice parameters and energy band gap as a function of the alloying level. For the lower LiGaO 2 concentration films, the energy band gap increased with that increasing alloying level and it was widened up to 3.97eV for x = 0.49, although a significant band gap bowing was observed. The broad absorption in the visible to nearinfrared region attributable to the conduction electrons was clearly detected in the transmission spectra of the as-deposited films with 0 ≤ × ≤ 0.5.

Original languageEnglish
Article number061102
JournalJapanese journal of applied physics
Issue number6 PART 1
Publication statusPublished - 2011 Jun
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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