Fabrication of varifocal scanner integrated with piezoresistive focal length and angle sensor

Kenta Nakazawa, Takashi Sasaki, Hiromasa Furuta, Jiro Kamiya, Hideki Sasaki, Toshikazu Kamiya, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present the varifocal scanner combined with the piezoresistors to monitor the rotation angle and focal length. The angle sensor measures with the accuracy of ±0.021 degree in the range of ±1.2 degree.

Original languageEnglish
Title of host publication2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781538607374
DOIs
Publication statusPublished - 2017 Sep 26
Event22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Santa Fe, United States
Duration: 2017 Aug 132017 Aug 17

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
CountryUnited States
CitySanta Fe
Period17/8/1317/8/17

Keywords

  • Varifocal mirror
  • piezoresistor
  • scanner

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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