Fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer arrays using glass reflow process

Nguyen Van Toan, Shim Hahng, Yunheub Song, Takahito Ono

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using glass reflow and anodic bonding techniques. Silicon through-wafer interconnects have been investigated by the glass reflow process. Then, the patterned silicon-glass reflow wafer is anodically bonded to an SOI (silicon-on-insulator) wafer for the fabrication of CMUT devices. The CMUT 5*5 array has been successfully fabricated. The resonant frequency of the CMUT array with a one-cell radius of 100 μm and sensing gap of 3.2 μm (distance between top and bottom electrodes) is observed at 2.84 MHz. The Q factor is approximately 1300 at pressure of 0.01 Pa.

Original languageEnglish
Article number76
JournalMicromachines
Volume7
Issue number5
DOIs
Publication statusPublished - 2016 Jan 1

Keywords

  • Anodic bonding
  • Capacitive micromachined ultrasonic transducer
  • Chemical sensing
  • Glass reflow process
  • Medical imaging
  • Non-destructive measurement

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer arrays using glass reflow process'. Together they form a unique fingerprint.

Cite this