Fabrication of ultrasonic sensors using micro cantilevers and characteristic measurement in vacuum for acoustic emission sensing

Kengo Takata, Takashi Sasaki, Mitsuyuki Tanaka, Hiroshi Saito, Daisuke Matsuura, Kazuhiro Hane

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Fabrication of ultrasonic sensors using micro cantilevers and characteristic measurement in vacuum for acoustic emission sensing'. Together they form a unique fingerprint.

Earth and Planetary Sciences

Engineering

Physics

Material Science

Agricultural and Biological Sciences