Fabrication of ultrasonic sensors using micro cantilevers and characteristic measurement in vacuum for acoustic emission sensing

Kengo Takata, Takashi Sasaki, Mitsuyuki Tanaka, Hiroshi Saito, Daisuke Matsuura, Kazuhiro Hane

Research output: Contribution to journalArticle

Abstract

Acoustic emission (AE) sensor is attractive to detect machine fracture in real-time. We fabricated AE sensors using MEMS technology. The AE sensors consist of silicon cantilevers resonating at the frequencies of 50kHz, 100kHz, and 150kHz. Silicon piezoresistors are installed close to the cantilevers. In order to obtain the ambient pressure appropriate for the operation of cantilevers, the Q factor of cantilever is calculated by the analytical models as a function of pressure. The properties of fabricated sensors were measured in vacuum chamber. We also tentatively packaged the AE sensor and an amplifier in vacuum to decrease the influences of air damping and noise.

Original languageEnglish
JournalIEEJ Transactions on Sensors and Micromachines
Volume134
Issue number7
DOIs
Publication statusPublished - 2014 Jan 1

Keywords

  • Acoustic emission sensor
  • Piezo resistance
  • Q factor
  • Silicon cantilever
  • Vacuum package

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Fabrication of ultrasonic sensors using micro cantilevers and characteristic measurement in vacuum for acoustic emission sensing'. Together they form a unique fingerprint.

Cite this