Fabrication of two-dimensional micro patterns for adaptive optics by using laser interference lithography

Xinghui Li, Yindi Cai, Ryo Aihara, Yuki Shimizu, So Ito, I Ko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a fabrication method of two-dimensional micro patterns for adaptive optics with a micrometric or sub-micrometric period to be used for fabrication of micro lens array or two-dimensional diffraction gratings. A multibeam two-axis Lloyd's mirror interferometer is employed to carry out laser interference lithography for the fabrication of two-dimensional grating structures. In the proposed instrument, the optical setup consists of a light source providing a laser beam, a multi-beam generator, two plane mirrors to generate a two-dimensional XY interference pattern and a substrate on which the XY interference pattern is to be exposed. In this paper, pattern exposure tests are carried out by the developed optical configuration optimized by computer simulations. Some experimental results of the XY pattern fabrication will be reported.

Original languageEnglish
Title of host publicationInternational Conference on Optical and Photonic Engineering, icOPEN 2015
EditorsAnand K. Asundi, Yu Fu
PublisherSPIE
ISBN (Electronic)9781628416848
DOIs
Publication statusPublished - 2015 Jan 1
Event3rd International Conference on Optical and Photonic Engineering, icOPEN 2015 - Singapore, Singapore
Duration: 2015 Apr 142015 Apr 16

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9524
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

Other3rd International Conference on Optical and Photonic Engineering, icOPEN 2015
CountrySingapore
CitySingapore
Period15/4/1415/4/16

Keywords

  • Adaptive optics
  • Grating
  • Interference lithography

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Li, X., Cai, Y., Aihara, R., Shimizu, Y., Ito, S., & Ko, I. (2015). Fabrication of two-dimensional micro patterns for adaptive optics by using laser interference lithography. In A. K. Asundi, & Y. Fu (Eds.), International Conference on Optical and Photonic Engineering, icOPEN 2015 [952404] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9524). SPIE. https://doi.org/10.1117/12.2184829