Abstract
Nb-doped anatase TiO2 (Ti0.94Nb0.06O 2) films with excellent conductivity and transparency were deposited on non-alkali glass by pulsed laser deposition. X-ray diffraction analysis and transmission electron microscopy confirmed that the obtained films were polycrystalline with anatase structure. The films deposited at a substrate temperature of 250°C with subsequent H2 annealing at 500°C showed a resistivity of 1.5 × 10-3 Ω·cm at room temperature and an optical transmittance of 60-80% in the visible region. These results indicate that anatase Ti0.94Nb0.06O2 has great potential as a transparent conducting oxide that could replace Sn-doped In2O3 (ITO).
Original language | English |
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Pages (from-to) | L86-L88 |
Journal | Japanese Journal of Applied Physics, Part 2: Letters |
Volume | 46 |
Issue number | 1-3 |
DOIs | |
Publication status | Published - 2007 Jan 12 |
Keywords
- Pulsed laser deposition
- Titanium dioxide
- Transparent conducting oxide
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)