Fabrication of TiO2-based transparent conducting oxide films on glass by pulsed laser deposition

Taro Hitosugi, Atsuki Ueda, Yutaka Furubayashi, Yasushi Hirose, Seiji Konuma, Toshihiro Shimada, Tetsuya Hasegawa

    Research output: Contribution to journalArticlepeer-review

    55 Citations (Scopus)

    Abstract

    Nb-doped anatase TiO2 (Ti0.94Nb0.06O 2) films with excellent conductivity and transparency were deposited on non-alkali glass by pulsed laser deposition. X-ray diffraction analysis and transmission electron microscopy confirmed that the obtained films were polycrystalline with anatase structure. The films deposited at a substrate temperature of 250°C with subsequent H2 annealing at 500°C showed a resistivity of 1.5 × 10-3 Ω·cm at room temperature and an optical transmittance of 60-80% in the visible region. These results indicate that anatase Ti0.94Nb0.06O2 has great potential as a transparent conducting oxide that could replace Sn-doped In2O3 (ITO).

    Original languageEnglish
    Pages (from-to)L86-L88
    JournalJapanese Journal of Applied Physics, Part 2: Letters
    Volume46
    Issue number1-3
    DOIs
    Publication statusPublished - 2007 Jan 12

    Keywords

    • Pulsed laser deposition
    • Titanium dioxide
    • Transparent conducting oxide

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy (miscellaneous)
    • Physics and Astronomy(all)

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