Fabrication of thin-film LAPS with amorphous silicon

Tatsuo Yoshinobu; Michael J. Schöning; Friedhelm Finger; Werner Moritz; Hiroshi Iwasaki

doi:10.3390/s41000163

Fabrication of thin-film LAPS with amorphous silicon

Tatsuo Yoshinobu, Michael J. Schöning, Friedhelm Finger, Werner Moritz, Hiroshi Iwasaki

Research output: Contribution to journal › Article › peer-review

28 Citations (Scopus)

Abstract

To improve the spatial resolution of the light-addressable potentiometric sensor (LAPS), it is necessary to reduce the thickness of the semiconductor layer, which, however, causes a problem of the mechanical strength of the sensor plate. In this study, a thin-film LAPS was fabricated with amorphous silicon (a-Si) deposited on a transparent glass substrate. The current-voltage characteristics and pH sensitivity of the fabricated a-Si LAPS were investigated.

Original language	English
Pages (from-to)	163-169
Number of pages	7
Journal	Sensors
Volume	4
Issue number	10
DOIs	https://doi.org/10.3390/s41000163
Publication status	Published - 2004
Externally published	Yes

ASJC Scopus subject areas

Analytical Chemistry
Information Systems
Biochemistry
Atomic and Molecular Physics, and Optics
Instrumentation
Electrical and Electronic Engineering

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10.3390/s41000163

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AU - Schöning, Michael J.

AU - Finger, Friedhelm

AU - Moritz, Werner

AU - Iwasaki, Hiroshi

PY - 2004

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Fabrication of thin-film LAPS with amorphous silicon

Abstract

ASJC Scopus subject areas

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