Fabrication of thin-film LAPS with amorphous silicon

Tatsuo Yoshinobu, Michael J. Schöning, Friedhelm Finger, Werner Moritz, Hiroshi Iwasaki

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)

Abstract

To improve the spatial resolution of the light-addressable potentiometric sensor (LAPS), it is necessary to reduce the thickness of the semiconductor layer, which, however, causes a problem of the mechanical strength of the sensor plate. In this study, a thin-film LAPS was fabricated with amorphous silicon (a-Si) deposited on a transparent glass substrate. The current-voltage characteristics and pH sensitivity of the fabricated a-Si LAPS were investigated.

Original languageEnglish
Pages (from-to)163-169
Number of pages7
JournalSensors
Volume4
Issue number10
DOIs
Publication statusPublished - 2004
Externally publishedYes

ASJC Scopus subject areas

  • Analytical Chemistry
  • Biochemistry
  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Electrical and Electronic Engineering

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