To improve the spatial resolution of the light-addressable potentiometric sensor (LAPS), it is necessary to reduce the thickness of the semiconductor layer, which, however, causes a problem of the mechanical strength of the sensor plate. In this study, a thin-film LAPS was fabricated with amorphous silicon (a-Si) deposited on a transparent glass substrate. The current-voltage characteristics and pH sensitivity of the fabricated a-Si LAPS were investigated.
|Number of pages||7|
|Publication status||Published - 2004|
ASJC Scopus subject areas
- Analytical Chemistry
- Information Systems
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering