Fabrication of Thin-Film Actuators Using Magnetostriction

T. Honda, M. Yamaguchi, K. I. Arai

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

We fabricated two kinds of cantilever actuator and a traveling machine by using magnetostrictive Tb-Fe and Sm-Fe thin films on a polyimide substrate. No power supply cable is required for their actuation, because they are driven by an external magnetic field. The magnetostrictive cantilevers exhibited a large deflection in low magnetic fields. Their unique characteristics suggest that magnetostriction can be used as the driving mechanism of microactuators.

Original languageEnglish
Pages (from-to)27-32
Number of pages6
JournalIEEE Translation Journal on Magnetics in Japan
Volume9
Issue number6
DOIs
Publication statusPublished - 1994

ASJC Scopus subject areas

  • Engineering (miscellaneous)

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