Fabrication of thick film magnetic cores for high frequency using LIGA process

Shinsuke Takimoto, Hiroshi Ueno, Susumu Sugiyama, Masahiro Yamaguchi, Makoto Baba, Ken Ichi Arai

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

Fabrication of magnetic cores with narrow slits which have low eddy current loss for high frequency Ires been investigated. The magnetic cores with narrow slits of 1.5 μm to 5μm in width were fabricated by the LIGA process which is composed of deep X-ray lithography using synchrotron radiation (SR) and Ni electroforming. Magnetic hysteresis loops and permeability of the magnetic cores with various slit widths and distances between slits were measured.

Original languageEnglish
Pages (from-to)2888-2890
Number of pages3
JournalIEEE Transactions on Magnetics
Volume37
Issue number4 I
DOIs
Publication statusPublished - 2001 Jul
Event8th Joint Magnetism and Magnetic Materials -International Magnetic Conference- (MMM-Intermag) - San Antonio, TX, United States
Duration: 2001 Jan 72001 Jan 11

Keywords

  • Eddy current
  • High aspect ratio
  • LIGA process
  • Magnetic core
  • Micromachining

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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