Fabrication of ternary phase composition-spread thin film libraries and their high-throughput characterization: Ti1-x-yZrxHf yO2 for bandgap engineering

Y. Yamada, T. Fukumura, M. Ikeda, M. Ohtani, H. Toyosaki, A. Ohtomo, F. Matsukura, H. Ohno, M. Kawasaki

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

Ternary phase composition-spread thin film libraries, TiO 2-ZrO2-HfO2, were synthesized by using a combinatorial pulsed laser deposition system. The composition, crystalline structure, and optical transmission properties were characterized in a high-throughput way. TiO2 doped with Zr and Hf was found to exhibit a wider bandgap than pure TiO2; hence, these compounds can be used as wide gap semiconductors for heteroepitaxial spintronics devices, based on a ferromagnetic semiconductor, Co-doped TiO2.

Original languageEnglish
Pages (from-to)109-113
Number of pages5
JournalJournal of Superconductivity and Novel Magnetism
Volume18
Issue number1
DOIs
Publication statusPublished - 2005

Keywords

  • Combinatorial library
  • Ferromagnetic semiconductor
  • Oxide semiconductor
  • TiO
  • Wide gap

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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