Fabrication of stable pn junction single-walled carbon nanotube thin films by position selective Cs plasma irradiation method

Y. Abiko, T. Kato, R. Hatakeyama, T. Kaneko

Research output: Contribution to journalConference article

Abstract

Stable n-type thin film transistors (TFTs) are fabricated with Cs encapsulated single-walled carbon nanotubes (Cs@SWNTs). The transport property of SWNTs-TFTs clearly changes from p- to n-type characteristic after the Cs plasma irradiation. Based on the systematic investigations, it is revealed that there is an optimum ion energy for the effective Cs encapsulation, which is around 50 eV. Furthermore, it is also found that the n-type feature is stable even in water and high temperature (< 400 °C) conditions. The pn junction structure is also realized by position selective doping of Cs. This very stable pn junction TFT is important for the practical application of SWNTs-based thin film electronics.

Original languageEnglish
Article number012013
JournalJournal of Physics: Conference Series
Volume518
Issue number1
DOIs
Publication statusPublished - 2014
Event26th Symposium on Plasma Sciences for Materials, SPSM 2013 - Fukuoka, Japan
Duration: 2013 Sep 232013 Sep 24

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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