Fabrication of silicon nanospheres placeable on a desired position for dielectric metamaterials in the visible region

Taiyu Okatani, Yosuke Abe, Takuya Nakazawa, Kazuhiro Hane, Yoshiaki Kanamori

Research output: Contribution to journalArticlepeer-review

Abstract

We proposed a fabrication method for silicon nanospheres with diameters of 100-200 nm at arbitrary locations by using electron-beam lithography and hydrogen annealing. The nanospheres showed a strong magnetic field response in the visible region that was observed as scattered light emitted from the nanospheres. The scattering spectra were calculated by finitedifference time-domain simulation. Periodically arranged silicon nanospheres were successfully fabricated as designed, and the scattered light was measured by dark-field illumination microscopy. The scattering spectra were in the visible range, and the peak position was redshifted as the diameter increased.

Original languageEnglish
Pages (from-to)189-197
Number of pages9
JournalOptical Materials Express
Volume11
DOIs
Publication statusPublished - 2020 Dec 22

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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