Silicon microdisk resonators with monolithically integrated comb-drive microactuators were fabricated for optical switches. Each of the resonators mainly consisted of a microdisk, a movable waveguide, a fixed waveguide, and a comb-drive microactuator. The gap distance between the movable waveguide and the microdisk could be controlled with the microactuator. Therefore, the power coupling ratios of the resonators were varied. Using the comb-drive microactuator, the resonator could be driven at low voltage of 21 V which had been difficult to drive the resonator using a parallel plate electrostatic microactuator ever. We fabricated the microdisk with a diameter of 10 μm. At a resonant wavelength of 1553.3nm and a voltage of 21 V applied to the microactuator, it was obtained that the light propagating into a through port was switched to the microdisk with an extinction ratio of 8.8 dB, a FWHM of 0.17 nm, and a quality factor of 9137.
ASJC Scopus subject areas
- Physics and Astronomy(all)