Fabrication of RF inductor using patterned FeTaN soft magnetic films

Seok Bae, Dong Hoon Shin, Chung Sik Kim, Sung Ryong Ryu, Seung Eui Nam, Jae Sung Song, Masahiro Yamaguchi, Hyoung June Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Chemical Compounds

Engineering & Materials Science