Fabrication of RF inductor using patterned FeTaN soft magnetic films

Seok Bae; Dong Hoon Shin; Chung Sik Kim; Sung Ryong Ryu; Seung Eui Nam; Jae Sung Song; Masahiro Yamaguchi; Hyoung June Kim

doi:10.1109/INTMAG.2002.1001053

Fabrication of RF inductor using patterned FeTaN soft magnetic films

Seok Bae, Dong Hoon Shin, Chung Sik Kim, Sung Ryong Ryu, Seung Eui Nam, Jae Sung Song, Masahiro Yamaguchi, Hyoung June Kim

ENG - Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Recently, RF lumped devices were in strong demand as an RF application especially in the of field of mobile communication. Many workers have been reported an RF integrated inductor as air core type. In order to achieve the high Q-value, backside substrate removing by micromachining process and optimization of coil structure by magnetic field simulator were approached. However, this MEMS-like approach is incapable of suppressing the parasitic effects effectively, and involves complex fabrication processes. So, we think that the achievement of high Q was easily realized using a magnetic amplification by magnetic materials. Resonance frequency of inductor was depends on ferro-magnetic resonance (FMR) loss and eddy current loss. Eddy current loss can easily controlled by limitation of thickness. FMR can controlled by stripe patterned magnetic films as increasing of uni-axial shape anisotropy.

Original language	English
Title of host publication	INTERMAG Europe 2002 - IEEE International Magnetics Conference
Editors	J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, Jo De Boeck, R. Wood
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	0780373650, 9780780373655
DOIs	https://doi.org/10.1109/INTMAG.2002.1001053
Publication status	Published - 2002 Jan 1
Event	2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands Duration: 2002 Apr 28 → 2002 May 2

Publication series

Name	INTERMAG Europe 2002 - IEEE International Magnetics Conference

Other

Other	2002 IEEE International Magnetics Conference, INTERMAG Europe 2002
Country	Netherlands
City	Amsterdam
Period	02/4/28 → 02/5/2

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering
Surfaces, Coatings and Films

Access to Document

10.1109/INTMAG.2002.1001053

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Bae, S., Shin, D. H., Kim, C. S., Ryu, S. R., Nam, S. E., Song, J. S., Yamaguchi, M., & Kim, H. J. (2002). Fabrication of RF inductor using patterned FeTaN soft magnetic films. In J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, J. De Boeck, & R. Wood (Eds.), INTERMAG Europe 2002 - IEEE International Magnetics Conference [1001053] (INTERMAG Europe 2002 - IEEE International Magnetics Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/INTMAG.2002.1001053

Fabrication of RF inductor using patterned FeTaN soft magnetic films. / Bae, Seok; Shin, Dong Hoon; Kim, Chung Sik; Ryu, Sung Ryong; Nam, Seung Eui; Song, Jae Sung; Yamaguchi, Masahiro; Kim, Hyoung June.

INTERMAG Europe 2002 - IEEE International Magnetics Conference. ed. / J. Fidler; B. Hillebrands; C. Ross; D. Weller; L. Folks; E. Hill; M. Vazquez Villalabeitia; J. A. Bain; Jo De Boeck; R. Wood. Institute of Electrical and Electronics Engineers Inc., 2002. 1001053 (INTERMAG Europe 2002 - IEEE International Magnetics Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Bae, S, Shin, DH, Kim, CS, Ryu, SR, Nam, SE, Song, JS, Yamaguchi, M & Kim, HJ 2002, Fabrication of RF inductor using patterned FeTaN soft magnetic films. in J Fidler, B Hillebrands, C Ross, D Weller, L Folks, E Hill, M Vazquez Villalabeitia, JA Bain, J De Boeck & R Wood (eds), INTERMAG Europe 2002 - IEEE International Magnetics Conference., 1001053, INTERMAG Europe 2002 - IEEE International Magnetics Conference, Institute of Electrical and Electronics Engineers Inc., 2002 IEEE International Magnetics Conference, INTERMAG Europe 2002, Amsterdam, Netherlands, 02/4/28. https://doi.org/10.1109/INTMAG.2002.1001053

Bae S, Shin DH, Kim CS, Ryu SR, Nam SE, Song JS et al. Fabrication of RF inductor using patterned FeTaN soft magnetic films. In Fidler J, Hillebrands B, Ross C, Weller D, Folks L, Hill E, Vazquez Villalabeitia M, Bain JA, De Boeck J, Wood R, editors, INTERMAG Europe 2002 - IEEE International Magnetics Conference. Institute of Electrical and Electronics Engineers Inc. 2002. 1001053. (INTERMAG Europe 2002 - IEEE International Magnetics Conference). https://doi.org/10.1109/INTMAG.2002.1001053

Bae, Seok ; Shin, Dong Hoon ; Kim, Chung Sik ; Ryu, Sung Ryong ; Nam, Seung Eui ; Song, Jae Sung ; Yamaguchi, Masahiro ; Kim, Hyoung June. / Fabrication of RF inductor using patterned FeTaN soft magnetic films. INTERMAG Europe 2002 - IEEE International Magnetics Conference. editor / J. Fidler ; B. Hillebrands ; C. Ross ; D. Weller ; L. Folks ; E. Hill ; M. Vazquez Villalabeitia ; J. A. Bain ; Jo De Boeck ; R. Wood. Institute of Electrical and Electronics Engineers Inc., 2002. (INTERMAG Europe 2002 - IEEE International Magnetics Conference).

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abstract = "Recently, RF lumped devices were in strong demand as an RF application especially in the of field of mobile communication. Many workers have been reported an RF integrated inductor as air core type. In order to achieve the high Q-value, backside substrate removing by micromachining process and optimization of coil structure by magnetic field simulator were approached. However, this MEMS-like approach is incapable of suppressing the parasitic effects effectively, and involves complex fabrication processes. So, we think that the achievement of high Q was easily realized using a magnetic amplification by magnetic materials. Resonance frequency of inductor was depends on ferro-magnetic resonance (FMR) loss and eddy current loss. Eddy current loss can easily controlled by limitation of thickness. FMR can controlled by stripe patterned magnetic films as increasing of uni-axial shape anisotropy.",

author = "Seok Bae and Shin, {Dong Hoon} and Kim, {Chung Sik} and Ryu, {Sung Ryong} and Nam, {Seung Eui} and Song, {Jae Sung} and Masahiro Yamaguchi and Kim, {Hyoung June}",

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AU - Bae, Seok

AU - Shin, Dong Hoon

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AU - Ryu, Sung Ryong

AU - Nam, Seung Eui

AU - Song, Jae Sung

AU - Yamaguchi, Masahiro

AU - Kim, Hyoung June

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AB - Recently, RF lumped devices were in strong demand as an RF application especially in the of field of mobile communication. Many workers have been reported an RF integrated inductor as air core type. In order to achieve the high Q-value, backside substrate removing by micromachining process and optimization of coil structure by magnetic field simulator were approached. However, this MEMS-like approach is incapable of suppressing the parasitic effects effectively, and involves complex fabrication processes. So, we think that the achievement of high Q was easily realized using a magnetic amplification by magnetic materials. Resonance frequency of inductor was depends on ferro-magnetic resonance (FMR) loss and eddy current loss. Eddy current loss can easily controlled by limitation of thickness. FMR can controlled by stripe patterned magnetic films as increasing of uni-axial shape anisotropy.

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