@inproceedings{85536890c8af441690028ec949c5e1c6,
title = "Fabrication of RF inductor using patterned FeTaN soft magnetic films",
abstract = "Recently, RF lumped devices were in strong demand as an RF application especially in the of field of mobile communication. Many workers have been reported an RF integrated inductor as air core type. In order to achieve the high Q-value, backside substrate removing by micromachining process and optimization of coil structure by magnetic field simulator were approached. However, this MEMS-like approach is incapable of suppressing the parasitic effects effectively, and involves complex fabrication processes. So, we think that the achievement of high Q was easily realized using a magnetic amplification by magnetic materials. Resonance frequency of inductor was depends on ferro-magnetic resonance (FMR) loss and eddy current loss. Eddy current loss can easily controlled by limitation of thickness. FMR can controlled by stripe patterned magnetic films as increasing of uni-axial shape anisotropy.",
author = "Seok Bae and Shin, {Dong Hoon} and Kim, {Chung Sik} and Ryu, {Sung Ryong} and Nam, {Seung Eui} and Song, {Jae Sung} and Masahiro Yamaguchi and Kim, {Hyoung June}",
year = "2002",
month = jan,
day = "1",
doi = "10.1109/INTMAG.2002.1001053",
language = "English",
series = "INTERMAG Europe 2002 - IEEE International Magnetics Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
editor = "J. Fidler and B. Hillebrands and C. Ross and D. Weller and L. Folks and E. Hill and {Vazquez Villalabeitia}, M. and Bain, {J. A.} and {De Boeck}, Jo and R. Wood",
booktitle = "INTERMAG Europe 2002 - IEEE International Magnetics Conference",
note = "2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 ; Conference date: 28-04-2002 Through 02-05-2002",
}