Fabrication of RF inductor using patterned FeTaN soft magnetic films

Seok Bae, Dong Hoon Shin, Chung Sik Kim, Sung Ryong Ryu, Seung Eui Nam, Jae Sung Song, Masahiro Yamaguchi, Hyoung June Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Recently, RF lumped devices were in strong demand as an RF application especially in the of field of mobile communication. Many workers have been reported an RF integrated inductor as air core type. In order to achieve the high Q-value, backside substrate removing by micromachining process and optimization of coil structure by magnetic field simulator were approached. However, this MEMS-like approach is incapable of suppressing the parasitic effects effectively, and involves complex fabrication processes. So, we think that the achievement of high Q was easily realized using a magnetic amplification by magnetic materials. Resonance frequency of inductor was depends on ferro-magnetic resonance (FMR) loss and eddy current loss. Eddy current loss can easily controlled by limitation of thickness. FMR can controlled by stripe patterned magnetic films as increasing of uni-axial shape anisotropy.

Original languageEnglish
Title of host publicationINTERMAG Europe 2002 - IEEE International Magnetics Conference
EditorsJ. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, Jo De Boeck, R. Wood
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)0780373650, 9780780373655
DOIs
Publication statusPublished - 2002 Jan 1
Event2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands
Duration: 2002 Apr 282002 May 2

Publication series

NameINTERMAG Europe 2002 - IEEE International Magnetics Conference

Other

Other2002 IEEE International Magnetics Conference, INTERMAG Europe 2002
CountryNetherlands
CityAmsterdam
Period02/4/2802/5/2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Surfaces, Coatings and Films

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    Bae, S., Shin, D. H., Kim, C. S., Ryu, S. R., Nam, S. E., Song, J. S., Yamaguchi, M., & Kim, H. J. (2002). Fabrication of RF inductor using patterned FeTaN soft magnetic films. In J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, J. De Boeck, & R. Wood (Eds.), INTERMAG Europe 2002 - IEEE International Magnetics Conference [1001053] (INTERMAG Europe 2002 - IEEE International Magnetics Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/INTMAG.2002.1001053