The fabrication of radio frequency (RF) inductor was discussed using patterned FeTaN soft magnetic films. FeTaN nanocrystalline films as a part of magnetic layer showed good soft magnetic properties as well as high magnetization saturation. The RF inductor combine patterned FeTaN film was fabricated.
|Journal||Digests of the Intermag Conference|
|Publication status||Published - 2002 Dec 1|
|Event||2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands|
Duration: 2002 Apr 28 → 2002 May 2
ASJC Scopus subject areas
- Electrical and Electronic Engineering