Fabrication of reaction-sintered Si3N4 ceramic microrotors

Jing Feng Li, Shinya Sugimoto, Shuji Tanaka, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review


A process for the microfabrication of Si3N4 ceramic microcomponents was introduced, which mainly consists of presintering of Si powder compacts, micromachining of presintered Si performs and reaction sintering of the micromachined Si performs. The process has high potential for Si3N4 3-dimensional microfabrication because it combines the machinability of presintered Si powder compacts and the near-net shaping characteristics of Si3N4 reaction sintering. Using this process, a reaction-sintered Si3N4 ceramic micro-turbine rotor with the diameter of 5 mm and the thickness of 1.2 mm was fabricated, whose blades are as thin as 70μm.

Original languageEnglish
Pages (from-to)1081-1085
Number of pages5
JournalWuji Cailiao Xuebao/Journal of Inorganic Materials
Issue number5
Publication statusPublished - 2003 Sep 1
Externally publishedYes


  • Ceramic microelectromechanical system
  • Ceramic turbine rotor
  • Microdevice
  • Microfabrication
  • Silicon nitride

ASJC Scopus subject areas

  • Materials Science(all)
  • Inorganic Chemistry


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