Abstract
Nano-structured perovskite-type proton-conducting thin films have been fabricated by SF6 fast atom beam (FAB) etching, with an ordered anodic porous alumina membrane as a lithographic mask. Period hexagonal structures (100 and 500 nm) are patterned on laser ablation-deposited SrCeO3 film on MgO (110) substrate. It is found from X-ray diffraction analysis that the lattice constant a, which is perpendicular to the substrate surface, decreases with decreasing periodicity of the nano-structure. The optical transmission and reflection spectra show typical features of surface-relief grating structures.
Original language | English |
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Pages (from-to) | 693-697 |
Number of pages | 5 |
Journal | Solid State Ionics |
Volume | 154-155 |
DOIs | |
Publication status | Published - 2002 Dec 2 |
Keywords
- Film
- Laser ablation
- Nano-fabrication
- Nano-ionics
- Proton conductors
ASJC Scopus subject areas
- Chemistry(all)
- Materials Science(all)
- Condensed Matter Physics