Fabrication of protonic conductors with nano-structured surface by porous alumina membrane mask

H. Yugami, T. Yoneta, H. Sai

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Nano-structured perovskite-type proton-conducting thin films have been fabricated by SF6 fast atom beam (FAB) etching, with an ordered anodic porous alumina membrane as a lithographic mask. Period hexagonal structures (100 and 500 nm) are patterned on laser ablation-deposited SrCeO3 film on MgO (110) substrate. It is found from X-ray diffraction analysis that the lattice constant a, which is perpendicular to the substrate surface, decreases with decreasing periodicity of the nano-structure. The optical transmission and reflection spectra show typical features of surface-relief grating structures.

Original languageEnglish
Pages (from-to)693-697
Number of pages5
JournalSolid State Ionics
Volume154-155
DOIs
Publication statusPublished - 2002 Dec 2

Keywords

  • Film
  • Laser ablation
  • Nano-fabrication
  • Nano-ionics
  • Proton conductors

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

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