Fabrication of protonic conductors with nano-structured surface by porous alumina membrane mask

H. Yugami; T. Yoneta; H. Sai

doi:10.1016/S0167-2738(02)00519-2

Fabrication of protonic conductors with nano-structured surface by porous alumina membrane mask

H. Yugami, T. Yoneta, H. Sai

ENG - Mechanical Systems Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Nano-structured perovskite-type proton-conducting thin films have been fabricated by SF₆ fast atom beam (FAB) etching, with an ordered anodic porous alumina membrane as a lithographic mask. Period hexagonal structures (100 and 500 nm) are patterned on laser ablation-deposited SrCeO₃ film on MgO (110) substrate. It is found from X-ray diffraction analysis that the lattice constant a, which is perpendicular to the substrate surface, decreases with decreasing periodicity of the nano-structure. The optical transmission and reflection spectra show typical features of surface-relief grating structures.

Original language	English
Pages (from-to)	693-697
Number of pages	5
Journal	Solid State Ionics
Volume	154-155
DOIs	https://doi.org/10.1016/S0167-2738(02)00519-2
Publication status	Published - 2002 Dec 2

Keywords

Film
Laser ablation
Nano-fabrication
Nano-ionics
Proton conductors

ASJC Scopus subject areas

Chemistry(all)
Materials Science(all)
Condensed Matter Physics

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10.1016/S0167-2738(02)00519-2

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title = "Fabrication of protonic conductors with nano-structured surface by porous alumina membrane mask",

abstract = "Nano-structured perovskite-type proton-conducting thin films have been fabricated by SF6 fast atom beam (FAB) etching, with an ordered anodic porous alumina membrane as a lithographic mask. Period hexagonal structures (100 and 500 nm) are patterned on laser ablation-deposited SrCeO3 film on MgO (110) substrate. It is found from X-ray diffraction analysis that the lattice constant a, which is perpendicular to the substrate surface, decreases with decreasing periodicity of the nano-structure. The optical transmission and reflection spectra show typical features of surface-relief grating structures.",

keywords = "Film, Laser ablation, Nano-fabrication, Nano-ionics, Proton conductors",

author = "H. Yugami and T. Yoneta and H. Sai",

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doi = "10.1016/S0167-2738(02)00519-2",

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T1 - Fabrication of protonic conductors with nano-structured surface by porous alumina membrane mask

AU - Yugami, H.

AU - Yoneta, T.

AU - Sai, H.

PY - 2002/12/2

Y1 - 2002/12/2

N2 - Nano-structured perovskite-type proton-conducting thin films have been fabricated by SF6 fast atom beam (FAB) etching, with an ordered anodic porous alumina membrane as a lithographic mask. Period hexagonal structures (100 and 500 nm) are patterned on laser ablation-deposited SrCeO3 film on MgO (110) substrate. It is found from X-ray diffraction analysis that the lattice constant a, which is perpendicular to the substrate surface, decreases with decreasing periodicity of the nano-structure. The optical transmission and reflection spectra show typical features of surface-relief grating structures.

AB - Nano-structured perovskite-type proton-conducting thin films have been fabricated by SF6 fast atom beam (FAB) etching, with an ordered anodic porous alumina membrane as a lithographic mask. Period hexagonal structures (100 and 500 nm) are patterned on laser ablation-deposited SrCeO3 film on MgO (110) substrate. It is found from X-ray diffraction analysis that the lattice constant a, which is perpendicular to the substrate surface, decreases with decreasing periodicity of the nano-structure. The optical transmission and reflection spectra show typical features of surface-relief grating structures.

KW - Film

KW - Laser ablation

KW - Nano-fabrication

KW - Nano-ionics

KW - Proton conductors

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DO - 10.1016/S0167-2738(02)00519-2

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VL - 154-155

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EP - 697

JO - Solid State Ionics

JF - Solid State Ionics

SN - 0167-2738

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