Fabrication of porous polyimide nanoparticles and their multilayered film

Gufan Zhao; Takayuki Ishizaka; Hitoshi Kasai; Hachiro Nakanishi

Fabrication of porous polyimide nanoparticles and their multilayered film

Gufan Zhao, Takayuki Ishizaka, Hitoshi Kasai, Hachiro Nakanishi

Polymer Hybrid Materials Research Center

Research output: Contribution to conference › Paper › peer-review

Abstract

Recently, porous polyimide (PI) nanoparticles have been successfully fabricated by reprecipitation method. After reprecipitation process, porous poly(amic acid) (PAA, precursor of PI) nanoparticles were obtained by using PAA solution adding other polymers as a source of pores. Then porous PI nanoparticles were fabricated by the two-step imidization of porous PAA nanoparticles without morphology transformation. Furthermore, multilayered films assembled by porous PI nanoparticles obtained were also successfully fabricated by electrodeposition method. It provides a new route to interlayer insulation films with lower dielectric constant for the prospective microelectronic applications.

Original language	English
Number of pages	1
Publication status	Published - 2005 Dec 1
Event	54th SPSJ Annual Meeting 2005 - Yokohama, Japan Duration: 2005 May 25 → 2005 May 27

Other

Other	54th SPSJ Annual Meeting 2005
Country	Japan
City	Yokohama
Period	05/5/25 → 05/5/27

Keywords

Electrodeposition
Laminated film
Polyimide
Porous nanoparticle
Reprecipitation method
Template method

ASJC Scopus subject areas

Engineering(all)

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title = "Fabrication of porous polyimide nanoparticles and their multilayered film",

abstract = "Recently, porous polyimide (PI) nanoparticles have been successfully fabricated by reprecipitation method. After reprecipitation process, porous poly(amic acid) (PAA, precursor of PI) nanoparticles were obtained by using PAA solution adding other polymers as a source of pores. Then porous PI nanoparticles were fabricated by the two-step imidization of porous PAA nanoparticles without morphology transformation. Furthermore, multilayered films assembled by porous PI nanoparticles obtained were also successfully fabricated by electrodeposition method. It provides a new route to interlayer insulation films with lower dielectric constant for the prospective microelectronic applications.",

keywords = "Electrodeposition, Laminated film, Polyimide, Porous nanoparticle, Reprecipitation method, Template method",

author = "Gufan Zhao and Takayuki Ishizaka and Hitoshi Kasai and Hachiro Nakanishi",

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T1 - Fabrication of porous polyimide nanoparticles and their multilayered film

AU - Zhao, Gufan

AU - Ishizaka, Takayuki

AU - Kasai, Hitoshi

AU - Nakanishi, Hachiro

PY - 2005/12/1

Y1 - 2005/12/1

N2 - Recently, porous polyimide (PI) nanoparticles have been successfully fabricated by reprecipitation method. After reprecipitation process, porous poly(amic acid) (PAA, precursor of PI) nanoparticles were obtained by using PAA solution adding other polymers as a source of pores. Then porous PI nanoparticles were fabricated by the two-step imidization of porous PAA nanoparticles without morphology transformation. Furthermore, multilayered films assembled by porous PI nanoparticles obtained were also successfully fabricated by electrodeposition method. It provides a new route to interlayer insulation films with lower dielectric constant for the prospective microelectronic applications.

AB - Recently, porous polyimide (PI) nanoparticles have been successfully fabricated by reprecipitation method. After reprecipitation process, porous poly(amic acid) (PAA, precursor of PI) nanoparticles were obtained by using PAA solution adding other polymers as a source of pores. Then porous PI nanoparticles were fabricated by the two-step imidization of porous PAA nanoparticles without morphology transformation. Furthermore, multilayered films assembled by porous PI nanoparticles obtained were also successfully fabricated by electrodeposition method. It provides a new route to interlayer insulation films with lower dielectric constant for the prospective microelectronic applications.

KW - Electrodeposition

KW - Laminated film

KW - Polyimide

KW - Porous nanoparticle

KW - Reprecipitation method

KW - Template method

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AN - SCOPUS:33645641707

T2 - 54th SPSJ Annual Meeting 2005

Y2 - 25 May 2005 through 27 May 2005

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