Fabrication of porous polyimide nanoparticles and their multilayered film

Gufan Zhao, Takayuki Ishizaka, Hitoshi Kasai, Hachiro Nakanishi

    Research output: Contribution to conferencePaperpeer-review

    Abstract

    Recently, porous polyimide (PI) nanoparticles have been successfully fabricated by reprecipitation method. After reprecipitation process, porous poly(amic acid) (PAA, precursor of PI) nanoparticles were obtained by using PAA solution adding other polymers as a source of pores. Then porous PI nanoparticles were fabricated by the two-step imidization of porous PAA nanoparticles without morphology transformation. Furthermore, multilayered films assembled by porous PI nanoparticles obtained were also successfully fabricated by electrodeposition method. It provides a new route to interlayer insulation films with lower dielectric constant for the prospective microelectronic applications.

    Original languageEnglish
    Number of pages1
    Publication statusPublished - 2005 Dec 1
    Event54th SPSJ Annual Meeting 2005 - Yokohama, Japan
    Duration: 2005 May 252005 May 27

    Other

    Other54th SPSJ Annual Meeting 2005
    Country/TerritoryJapan
    CityYokohama
    Period05/5/2505/5/27

    Keywords

    • Electrodeposition
    • Laminated film
    • Polyimide
    • Porous nanoparticle
    • Reprecipitation method
    • Template method

    ASJC Scopus subject areas

    • Engineering(all)

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