Fabrication of porous polyimide nanoparticles and their multilayered film

Gufan Zhao, Takayuki Ishizaka, Hitoshi Kasai, Hachiro Nakanishi

Research output: Contribution to conferencePaperpeer-review

Abstract

Recently, porous polyimide (PI) nanoparticles have been successfully fabricated by reprecipitation method. After reprecipitation process, porous poly(amic acid) (PAA, precursor of PI) nanoparticles were obtained by using PAA solution adding other polymers as a source of pores. Then porous PI nanoparticles were fabricated by the two-step imidization of porous PAA nanoparticles without morphology transformation. Furthermore, multilayered films assembled by porous PI nanoparticles obtained were also successfully fabricated by electrodeposition method. It provides a new route to interlayer insulation films with lower dielectric constant for the prospective microelectronic applications.

Original languageEnglish
Number of pages1
Publication statusPublished - 2005 Dec 1
Event54th SPSJ Annual Meeting 2005 - Yokohama, Japan
Duration: 2005 May 252005 May 27

Other

Other54th SPSJ Annual Meeting 2005
CountryJapan
CityYokohama
Period05/5/2505/5/27

Keywords

  • Electrodeposition
  • Laminated film
  • Polyimide
  • Porous nanoparticle
  • Reprecipitation method
  • Template method

ASJC Scopus subject areas

  • Engineering(all)

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