Abstract
Recently, porous polyimide (PI) nanoparticles have been successfully fabricated by reprecipitation method. After reprecipitation process, porous poly(amic acid) (PAA, precursor of PI) nanoparticles were obtained by using PAA solution adding other polymers as a source of pores. Then porous PI nanoparticles were fabricated by the two-step imidization of porous PAA nanoparticles without morphology transformation. Furthermore, multilayered films assembled by porous PI nanoparticles obtained were also successfully fabricated by electrodeposition method. It provides a new route to interlayer insulation films with lower dielectric constant for the prospective microelectronic applications.
| Original language | English |
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| Number of pages | 1 |
| Publication status | Published - 2005 Dec 1 |
| Event | 54th SPSJ Annual Meeting 2005 - Yokohama, Japan Duration: 2005 May 25 → 2005 May 27 |
Other
| Other | 54th SPSJ Annual Meeting 2005 |
|---|---|
| Country/Territory | Japan |
| City | Yokohama |
| Period | 05/5/25 → 05/5/27 |
Keywords
- Electrodeposition
- Laminated film
- Polyimide
- Porous nanoparticle
- Reprecipitation method
- Template method
ASJC Scopus subject areas
- Engineering(all)